MicroChem Primer 80/20 is based on a combination of 20% HMDS and 80% PM Acetate. HMDS is the best known chemical pretreatment for increasing photoresist adhesion to oxides, nitrides, polysilicon, glass, quartz and other difficult surfaces. PM Acetate acts as an effective pre-wetting agent.

Advantages:

• Improved wet etch performance
• Compatible with most positive photoresists
• Improved critical dimension control
• Combination pre-wet and adhesion promoter

Instructions for Use:

1. Make up: MCC Primer 80/20 should be used as supplied.
   
   
2. Procedure/Use: Priming just prior to photoresist coating improves adhesion by producing an interfacial bonding layer for the resist and by removing any moisture from the substrate surface.
   
   Spin priming may be done by puddle or spray. The primer should be in contact with the surface for a minimum of 10 seconds followed by spin drying for 20 - 30 seconds at 3000 - 5000 rpm or until interference fringes are no longer observed.
   
   
3. Bake at 105 -115C for 1-3 minutes

Equipment:

MCC Primer 80/20 is compatible with most commercially available photoresist processing equipment. Recommended compatible materials include stainless steel, glass, ceramic, unfilled polypropylene, high-density polyethylene, polytetrafluoroethylene or equivalent materials.

Handling Procedures: WARNING! MCC Primer 80/20 is a flammable liquid. Hexamethyldislazane can react with water to form ammonia and hexamethyldisiloxane. Harmful if swallowed. May cause burns. Avoid contact with skin and eyes. Avoid breathing of vapors. Keep away from oxidants, heat, sparks, and open flame. Handle with care. Wear chemical goggles, rubber gloves, and protective clothing.

Storage:

Store in dry area at 50 - 70F (10 - 21C) in closed original containers away from oxidants, heat, sparks, and open flame. Do not store in sunlight. Please observe stated shelf life. MCC Primer 80/20 will deteriorate slowly when exposed to air.

Disposal:

MCC Primer 80/20 should be disposed of with other solvent wastes observing all national, state and local regulations.