Resist Manufacturer Launches New Product

Newton, MA. MicroChem Corp., a manufacturer of Lift Off, MEMS, e-beam and other specialty resist products, announced the introduction of MicroSpray™, photoresist in an aerosol spray can. MicroSpray™ is a positive-acting, broadband resist based on a long proven, mature, novolak technology, which has been adapted to an aerosol spray can. MicroSpray™ is ideally suited for developmental applications including perforated, 3-dimensional and other substrates that have severe topography, such as V grooves and many other MEMS features.

Harris Miller, R&D Product Mgr for MicroSpray™, states that “The cost of ownership is very low, since no special coating equipment is needed. MicroSpray™ is also an enabling technology for those that do not have and/or cannot afford coating tools.” Gwen Donahue, MEMS Engineer with MicroCHIPS, Inc. says, “I was very pleased with the results of MicroSpray™. The coverage of the 100um sidewalls is exactly what I wanted to see on these wafers and I was unable to get this result using spin on resist. Your product is very good and I would recommend it to others that have similar processing challenges.”

MicroSpray™ is available in a 14.5oz aerosol spray can and is capable of delivering 200 coatings on a 6 inch wafer.

MicroSpray™ is the latest addition to MCC’s resist portfolio that includes PMGI, PMMA and SU-8. MCC is also the exclusive distributor for Rohm and Haas Electronic Materials (formerly Shipley Co.) to the Americas.

MicroChem Corp. products are sold direct in North America and South America and through their local representatives in Asia and Europe.

Scott Heidemann
Sales & Marketing Manager

MicroChem Corp.
1243 Chestnut Street
Newton, MA 02464
617-965-5511 x311
sheidemann
@microchem.com