MicroChem introduces LOR lift-off resists for compound semiconductor device processing

Newton, MA. MicroChem Corp. (MCC) announces the introduction of LOR resists for advanced lift-off processing of GaAs, InP and other III-V discrete and MMIC devices such as HBTs, PHEMTs, FETs and VCSELs. Formulations cover a broad range of film thicknesses to permit clean lift-off of metal depositions from <50 Angstroms to >2.5um. Used in bi-layer resist processes, LORs can produce sub micron profiles, will not intermix with g-line, i-line and deep UV resists and do not require an exposure step.

Scott Heidemann, international sales manager says that "bi-layer resist processing may be relatively new to the compound semiconductor community, but the basic technology platform has a long and successful track record in MR and GMR head manufacturing, where it dominates the lift-off market. Bi-layer lift-off processing with LOR is truly state of the art; and as the thin film head market has discovered, this technology offers competitive advantages in resolution, process robustness and yield. The LOR bi-layer process requires an additional coating step, however the pay off is in superb control of the reentrant sidewall profile, which is key to clean lift-off processes. LORs also enable our customers to leverage the technologies of advanced I-line and deep UV resists and run high volume, high yield processes at 0.35µm and 0.25µm respectively, which is unobtainable with other lift-off technologies."

MicroChem Corp. designs and manufactures microelectronic materials for niche and emerging lithographic applications with heavy emphasis on lift-off processing. Products include PMGI and LORs for optical lift-off processes. PMMA for wafer thinning and direct write e-beam lithography and SU-8 for MEMS and optoelectronic applications. The company also offers a full range of ancillary products such as resist developers, edge bead removers and strippers. For more information on LOR or other MCC products, please contact the technical sales group at MicroChem Corp., 1254 Chestnut St., Newton, MA, 02464. Tel: 617 965-5511, Fax: 617 965 5818, e-mail: sales@microchem.com, www.microchem.com.

Scott Heidemann
Sales & Marketing Manager

MicroChem Corp.
1243 Chestnut Street
Newton, MA 02464
617-965-5511 x311
sheidemann
@microchem.com