(MF-11-01) Suspended SU-8 structures for monolithic microfluidic channels Moser, Y. (Laboratory of Microsystems, Ecole Polytechnique Fédérale de Lausanne, Lausanne (EPFL), EPFL STI IMT LMIS2, 1015 Lausanne, Switzerland); Forti, R.; Jiguet, S.; Lehnert, T.; Gijs, M.A.M.

Microfluidics and Nanofluidics, v 10, n 1, p 219-224, January, 2011

(MF-11-02) Fabrication process of a SU-8 monolithic pressurized microchamber for pressure driven microfluidic applications Moreno, J.M. (Dept. de Ing. Electron., Univ. of Seville, Seville, Spain); Perdigones, F.; Quero, J.M.

2011 Proceedings of the 8th Spanish Conference on Electron Devices (CDE'2011), p 4 pp., 2011

(MF-11-03) Design and fabrication of SU-8 arrayed-waveguide gratings using multimode interference couplers

Zhu, Yunpeng (Centre for Optical and Electromagnetic Research, State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou, China); Yang, Bo; Jiao, Yuqing; Dai, Daoxin

Proceedings of SPIE - The International Society for Optical Engineering, v 7986, 2011, Passive Components and Fiber-Based Devices VII

(MF-11-04) Fabrication of SU-8 microreactors for radiopharmaceutical production

Zizzari, A. (National Nanotechnology Laboratory (CNR-INFM), Distretto Tecnologico ISUFI, Università del Salento, via Arnesano,I-73100 Lecce, Italy); Arima, V.; Zacheo, A.; Pascali, G.; Salvadori, P.; Perrone, E.; Mangiullo, D.; Rinaldi, R.

Microelectronic Engineering, 2011

(MF-11-05) Fully integrated PDMS/SU-8/quartz microfluidic chip with a novel macroporous poly dimethylsiloxane  (PDMS) membrane for isoelectric focusing of proteins using whole-channel imaging detection

Seyed Mostafa Shameli1, Caglar Elbuken1 Junjie Ou1,2 Carolyn L. Ren1 Janusz Pawliszyn2

1 Dept. of Mechanical and Mechatronics Engineering, University of Waterloo, Waterloo, ON, Canada

2 Department of Chemistry, University of Waterloo, Waterloo, ON, Canada

Electrophoresis, 32, 333–339, 2011

(MF-11-06) Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8

Rouabah, H.A. (Sch. of Electron. & Comput. Sci., Univ. of Southampton, Southampton, United Kingdom); Park, B.Y.; Zaouk, R.B.; Morgan, H.; Madou, M.J.; Green, N.G.

Journal of Micromechanics and Microengineering, v 21, n 3, p 035018 (9 pp.), March, 2011

(MF-11-07) Selective Thin Film Deposition for Optofluidic Platforms with Optimized Transmission

Phillips, B.S.; Jenkins, M.H.; Liu, S.L.; Schmidt, H.; Hawkins, A.R.; Photonics Technology Letters, IEEE Volume: PP , Issue: 99 Digital Object Identifier: 10.1109/LPT.2011.2132125 Page(s): 1, 2011

(SM-11-01) Tribo-functionalizing Si and SU-8 materials by surface modification for application in MEMS/NEMS actuator-based devices

Author(s): Singh, RA; Satyanarayana, N; Kustandi, TS, et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS   Volume: 44   Issue: 1   Article Number: 15301   2011

(SM-11-02) Surface modification of 2D/3D SU-8 patterns with a swelling-deswelling method

Kim, Hye-Na (Department of Chemical and Biomolecular Engineering, Sogang University, 1 Sinsu-dong, Mapo-gu Seoul, Korea, Republic of); Kang, Ji-Hwan; Jin, Woo-Min; Moon, Jun Hyuk

Soft Matter, v 7, n 6, p 2989-2993, March 21, 2011

(SM-11-03) Effects of microstructure geometry and plasma modification on wetting properties of SU-8 surfaces

Kobayashi, Seiya (Yamagata Research Institute of Technology, Yamagata 990-2473, Japan); Makino, Eiji; Mineta, Takashi; Komatsuzaki, Tomohiro

Microelectronic Engineering, 2011

(SM-11-04) Chemical synthesis on SU-8

Katrine Qvortrup, Kennedy M. Taveras, Ole Thastrup, and Thomas E. Nielsen Chem. Commun. 47 1309 (2011)

(CM-11-02) Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8 Rouabah, H.A. (Sch. of Electron. & Comput. Sci., Univ. of Southampton, Southampton, United Kingdom); Park, B.Y.; Zaouk, R.B.; Morgan, H.; Madou, M.J.; Green, N.G.

Journal of Micromechanics and Microengineering, 21, 3, p 035018 (9 pp.), March, 2011

(MW-11-01) High Density Low Cost Microfluidic Addressable Microwell Biochips

Michael Minot, Chris Craven, George Cernigliaro, Andrew Golden

Incom, MicroChem, MinoTech Engineering

European Lab Automation Conference - Hamburg, June 30, 2011

(DP-11-01) Highly Transparent SU-8 Photoresist Barrier Rib for a Transparent AC Plasma Display Panel

Sung-Min Lee; Seung Hwa Oh; Kyung Cheol Choi; Display Technology, Journal of Volume: 7 , Issue: 1  DOI: 10.1109/JDT.2010.2089783 Page(s): 40 – 43, 2011

(DP-11-02) Electrowetting: a flexible electronic-paper technology

Andrew Steckl, Duk-Young Kim and Han You

SPIE Newsroom. 15 February 2011

(SM-11-01) Tribo-functionalizing Si and SU-8 materials by surface modification for application in MEMS/NEMS actuator-based devices

Author(s): Singh, RA; Satyanarayana, N; Kustandi, TS, et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS   Volume: 44   Issue: 1   Article Number: 15301   2011

(SM-11-02) Surface modification of 2D/3D SU-8 patterns with a swelling-deswelling method

Kim, Hye-Na (Department of Chemical and Biomolecular Engineering, Sogang University, 1 Sinsu-dong, Mapo-gu Seoul, Korea, Republic of); Kang, Ji-Hwan; Jin, Woo-Min; Moon, Jun Hyuk

Soft Matter, v 7, n 6, p 2989-2993, March 21, 2011

(SM-11-03) Effects of microstructure geometry and plasma modification on wetting properties of SU-8 surfaces

Kobayashi, Seiya (Yamagata Research Institute of Technology, Yamagata 990-2473, Japan); Makino, Eiji; Mineta, Takashi; Komatsuzaki, Tomohiro

Microelectronic Engineering, 2011

(SM-11-04) Chemical synthesis on SU-8

Katrine Qvortrup, Kennedy M. Taveras, Ole Thastrup, and Thomas E. Nielsen Chem. Commun. 47 1309 (2011)

(LG-10-01) UV-LIGA microfabrication of 220 GHz sheet beam amplifier gratings with SU-8 photoresists

Joye, Colin D.; Calame, Jeffrey P.; Garven, Morag; Levush, Baruch

Journal of Micromechanics and Microengineering, Volume 20, Issue 12, pp. 125016 (2010).

(LG-10-02) UV Lithography and Molding Fabrication of Ultrathick Micrometallic Structures Using a KMPR Photoresist

Young-Min Shin  Gamzina, D.  Barnett, L.R.  Yaghmaie, F.  Baig, A.  Luhmann, N.C.

Dept. of Appl. Sci., Univ. of CA, Davis, CA, USA

Microelectromechanical Systems, Journal of   June, 2010

(MF-10-01) Nanofluidic channels fabricated by e-beam lithography and polymer reflow sealing

Fouad, Mina; Yavuz, Mustafa; Cui, Bo; Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Volume: 28 , Issue: 6  Digital Object Identifier: 10.1116/1.3517620 Page(s): C6I11 - C6I13, 2010

(MF-10-02) Polymer (SU-8) optofluidic device with embedded hydrogel oxygen sensing elements

Zhan Gao; Henthorn, D.B.; Chang-Soo Kim; Sensors, 2010 IEEE  Digital Object Identifier: 10.1109/ICSENS.2010.5690839 Page(s): 79 – 82, 2010

(SM-10-01) Stable superhydrophobic surfaces induced by dual-scale topography on SU-8

Jose Marquez-Velasco a,b, Maria-Elena Vlachopoulou a, Angeliki Tserepi a,*, Evangelos Gogolides a

a Institute of Microelectronics NCSR Demokritos, 15310 Aghia Paraskevi, Greece

b University of Seville, Physics Dept., Avda. Reina Mercedes s/n, 41012 Sevilla, Spain

Microelectronic Engineering 87  782–785, 2010

(SM-10-02) Effect of surface treatments/coatings and soft bake profile on surface uniformity and adhesion of SU-8 on a glass substrate

Samantha Grist, Jasbir N. Patel, Moeed Haq, Bonnie L. Gray, and Bozena Kaminska Proc. SPIE 7593 75930F (2010)

(MW-10-01) New protocol for oligonucleotide microarray fabrication using SU-8-coated glass microslides.

Indian Institute of Toxicology Research (CSIR), Mahatma Gandhi Marg, Lucknow, India.

Bioconjug Chem. Sep 15;21(9):1703-8, 2010

(DP-10-01) Electrowetting on paper for electronic paper display

D. Y. Kim, A. J. Steckl,

ACS Appl. Mater. Interfaces 2, pp 3318 - 3323, 2010

(DP-10-02) Low Voltage Driving Color Active Matrix Electrophoretic Display

P-107: SID Symposium Digest of Technical Papers -- May 2010 -- Volume 41, Issue 1, pp.

(DP-10-03) Emergence of the e-book

S. Harris,

Nat. Photon. Technol. Focus 4, pp. 748–749, 2010

(DP-10-04) High reflectivity electrofluidic pixels with zero-power grayscale operation

S. Yang, K. Zhou, E. Kreit, and J. Heikenfeld

Appl. Phys. Lett. 97, p. 143501, 2010

(DP-10-05) Transmissive electrowetting-based displays for portable multimedia devices

A. Giraldo, J. Aubert, N. Bergeron, E. Derckx, B. J. Feenstra, R. Massard, J. Mans, A. Slack, and P. Vermeulen

J. Soc. Instr. Displays 18, pp. 317–325, 2010

(DP-10-06) Three-color electrowetting display device for electronic paper

H. You and A. J. Steckl

Department of Electrical and Computer Engineering, Nanoelectronics Laboratory, University of Cincinnati, Cincinnati, Ohio 45221-0030, USA

Appl. Phys. Lett. 97, 023514 (2010) (3 pages

(DI-10-01) Permanent Epoxy Used for Gate Dielectric & ILD Layers in Organic TFT Back-Planes

A. Cooper, G Cernigliaro, T. Adams, S. McGloin, T. Pease, S. K. Chatterjee & Dave Barwick

Plastic Electronics 2010

(DI-10-02) AMOLED Displays using Transfer-Printed Integrated Circuits

Ronald S. Cok*, John W. Hamer*

Christopher A. Bower, Etienne Menard, and Salvatore Bonafede

Semprius Inc., 4915 Prospectus Dr., Suite C, Durham, NC, 27713, U.S.A.

60.3   902 • SID, 2010

(ML-10-01) Fabrication of aspherical SU-8 microlens array utilizing novel stamping process and electro-static pulling method

Shu-Ming Kuo and Che-Hsin Lin Opt. Express 18 19114 (2010)

(ML-10-02) Fabrication of micro-lenses for optical interconnection using micro ink-jetting technique

Journal of Microelectronic Engineering, Volume 87 Issue 5-8, May, 2010

(ML-10-03) Polymer microptics for VCSELs beam shaping

LAAS-CNRS

VCSEL Day Torino May 7, 2010

(ML-10-04) Optical Manipulation of Microparticles in an SU-8/PDMS Hybrid Microfluidic Chip Incorporating a Monolithically Integrated On-Chip Lens Set

Honglei Guo;   Ping Zhao;   Gaozhi Xiao;   Zhiyi Zhang;   Jianping Yao; Microwave Photonics Res. Lab., Univ. of Ottawa, Ottawa, ON, Canada

Selected Topics in Quantum Electronics, IEEE Journal of; 16 Issue:4, pages: 919-26,July-Aug. 2010

(SM-10-01) Stable superhydrophobic surfaces induced by dual-scale topography on SU-8

Jose Marquez-Velasco a,b, Maria-Elena Vlachopoulou a, Angeliki Tserepi a,*, Evangelos Gogolides a

a Institute of Microelectronics NCSR Demokritos, 15310 Aghia Paraskevi, Greece

b University of Seville, Physics Dept., Avda. Reina Mercedes s/n, 41012 Sevilla, Spain

Microelectronic Engineering 87  782–785, 2010

(SM-10-02) Effect of surface treatments/coatings and soft bake profile on surface uniformity and adhesion of SU-8 on a glass substrate

Samantha Grist, Jasbir N. Patel, Moeed Haq, Bonnie L. Gray, and Bozena Kaminska Proc. SPIE 7593 75930F (2010)

(SM-10-03) Surface hydrophilization of SU-8 by plasma and wet chemical processes

Ferdinand Walther¹, Tanja Drobek¹, Alexander M. Gigler¹, Marc Hennemeyer¹, Michael Kaiser², Helmut Herberg², Tetsuji Shimitsu³, Gregor E. Morfill³, Robert W. Stark^1,*

Surface and Interface Analysis Vol 42, Issue 12-13, p. 1735-44, 2010

(WG-10-01) Integrated photonics devices on SU8 organic materials

B. Bêche

Institut de Physique de Rennes, IPR UMR CNRS 6251, Université de Rennes 1, France.

International Journal of Physical Sciences Vol. 5(5), pp. 612-618, June, 2010

(WG-10-02) Silicon nanocrystals light-emitting devices: characterization and coupling to SU-8 waveguides  David Izquierdo, María C. Garralaga, Iñigo Salinas, Jorge Barreto, Carlos Domínguez, and Ignacio Garcés Proc. SPIE 7719 77190M (2010)

(WG-10-03) Low-loss strip-loaded slot waveguides in Silicon-on-Insulator

Ran Ding,1,5 Tom Baehr-Jones,1,4 Woo-Joong Kim,2 Xugang Xiong,1 Richard Bojko,1 Jean-Marc Fedeli,3 Maryse Fournier,3 and Michael Hochberg1

1 Department of Electrical Engineering, University of Washington, Campus Box 352500, Seattle, Washington 98195, USA

2 Department of Physics, Seattle University, 901 12th Ave., Seattle, Washington 98122, USA

3 CEA LETI, Minatec 17 rue des Martyrs, 38054 Grenoble, France

Vol. 18, No. 24 / OPTICS EXPRESS, 2010

(WG-10-04) Polymeric waveguides with embedded micromirrors formed by Metallic Hard Mold

Xinyuan Dou a, Xiaolong Wang b, Haiyu Huang a, Xiaohui Lin a, Duo Ding a, David Z. Pan a

and Ray T. Chen a

a Department of Electrical and Computer Engineering, University of Texas at Austin, Austin, TX, 78758, USA

b Omega Optics, Inc. Austin, TX 78759

Vol. 18, No. 1 / OPTICS EXPRESS 378, 2010

(WG-10-05) Facet-embedded thin-film III–V edge-emitting lasers integrated with SU-8 waveguides on silicon Sabarni Palit, Jeremy Kirch, Mengyuan Huang, Luke Mawst, and Nan Marie Jokerst Opt. Lett. 35 3474 (2010)

(WG-10-06) SU-8 rib waveguide Bragg grating filter using composite stamp and solvent-assisted microcontact molding technique Cheng-Sheng Huang, Yue-Bun Pun, and Wei-Chih Wang J. Micro/Nanolith. MEMS MOEMS 9, 023013 (2010)

(WG-10-07) Design and fabrication of SU-8 array waveguide gratings using multimode interference couplers

Yunpeng Zhu; Bo Yang; Yuqing Jiao; Daoxin Dai; Communications and Photonics Conference and Exhibition (ACP), 2010 Asia DOI: 10.1109/ACP.2010.5682623 Page(s): 550 – 551, 2010

Proc. SPIE 7986 79860F (2010)

(WG-10-08) Integration of organic semiconductor lasers and single-mode passive waveguides into a PMMA substrate Vannahme, Christoph (Institut für Mikrostrukturtechnik (IMT), Karlsruhe Institute of Technology, 76128 Karlsruhe, Germany); Klinkhammer, Sönke; Kolew, Alexander; Jakobs, Peter-Jürgen; Guttmann, Markus; Dehm, Simone; Lemmer, Uli; Mappes, Timo

(LG-09-01) Research on fabrication of microstructure by using UV-LIGA

Zheng, Xiaohu, Mechanical Department of Huaiyin Institute, Huaian 223001, China

Intern. Technology and Innovation Conference, 2006. ITIC 2006 6-7 Nov. 2006 1194 – 1197, Hangzhou, China ISSN: 0537-9989 19 Jan. 2009

(MF-09-01) Fabrication of a hybrid PDMS/SU-8/quartz microfluidic chip for enhancing UV absorption whole-channel imaging detection sensitivity and application for isoelectric focusing of proteins Junjie Ou, Tomasz Glawdel, Carolyn L. Ren, and Janusz Pawliszyn Lab Chip 9 1926, 2009 

(MF-09-02) SU-8 microfluidic channels with porous sidewalls for biological applications

Michael R. Padgen, Alison Gracias, Natalya Tokranova, Nathaniel Cady, and James Castracane Proc. SPIE 7207 720707, 2009 

(SM-09-01) Simple surface modification techniques for immobilization of biomolecules on SU-8 Author(s): Deepu, A; Sai, VVR; Mukherji, S

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN MEDICINE   Volume: 20   Pages: 25-28, 2009 

(SM-09-02) A low temperature surface modification assisted method for bonding plastic substrates

M-E Vlachopoulou1, A Tserepi1, P Pavli1, P Argitis1, M Sanopoulou2 and K Misiakos1

1 Institute of Microelectronics, NCSR ‘Demokritos’, 153 10 Aghia Paraskevi, Greece

2 Institute of Physical Chemistry, NCSR ‘Demokritos’, 153 10 Aghia Paraskevi, Greece

J. Micromech. Microeng. 19 (2009) 015007 (6pp) 

(MW-09-01) Enrichment and Expansion of Cells Using Antibody-Coated Micropallet Arrays

Hamed Shadpour, Christopher E. Sims, Nancy L. Allbritton*

Department of Chemistry, University of North Carolina, Chapel Hill, North Carolina 27599

Published online 4 June 2009 in Wiley InterScience (www.interscience.  wiley.com) 

(DP-09-01) A full description of a simple and scalable fabrication process for electrowetting displays

K Zhou1, J Heikenfeld1, K A Dean2, E M Howard2 and M R Johnson2

1 Novel Devices Laboratory, Department of Electrical and Computer Engineering, University of Cincinnati, Cincinnati, OH 45221, USA  2 Applied Research and Technology Center, Motorola, Tempe, AZ 85284, USA

J. Micromech. Microeng. 19 065029 12pp, 2009 

(DP-09-02) Complementary electrowetting devices on plasma-treated fluoropolymer surfaces

D. Y. Kim and A. J. Steckl

Langmuir 26, pp. 9474–9483, 2009 

(ML-09-01) Planar micro-optic solar concentrator

Karp JH, Tremblay EJ, Ford JE.

Dept. of Electrical and Computer Engineering, University of California, San Diego, La Jolla, CA 92093-0407, USA.

Opt Express. Jan 18 (2):1122-33 (2009) 

ML-09-02) Fabrication of microlens arrays based on the mass transport effect of SU-8 photoresist using a multiexposure two-beam interference technique  Cheng Yi Wu, Ting Hsuan Chiang, Ngoc Diep Lai, Danh Bich Do, and Chia Chen Hsu Appl. Opt. 48 2473 (2009) 

(ML-09-03) Non-Spherical SU-8 Microlens Array Fabricated Utilizing a Novel Stamping Process and an Electro-Static Pulling Method

Shu-Ming Kuo; Che-Hsin Lin; Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on Digital Object Identifier: 10.1109/MEMSYS.2009.4805551 Page(s): 987 – 990, 2009 

(ML-09-04) Highly efficient 2-D nano focusing by an optical system of planar refractive lenses

V. Nazmova,b, E. Reznikovaa,b, A. Lasta,b, V. Sailea,b

a) Institute for Microstructure Technology, Forschungszentrum Karlsruhe GmbH, 76021 Karlsruhe, Germany

b) Institute for Microstructure Technology, Karlsruhe University, 76131 Karlsruhe, Germany

Journal of Physics: Conference Series 186 012069 (2009)

(MF-08-01) An SU-8 based fluidic immuno-spectroscopic lab-on-a-chip for rapid quantitative detection of biomolecules

Linan Jiang; Gerhardt, K.P.; Myer, B.; Zohar, Y.; Pau, S.; Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on; Digital Object Identifier: 10.1109/MEMSYS.2008.4443628 Page(s): 204 – 207, 2008

(MF-08-02) A novel microfluidic sensor system fabricated by SU-8 femtosecond pulsed laser prototyping

Rosenauer, M.; Zoppel, S.; Vellekoop, M.J.; Electronics Technology, 2008. ISSE '08. 31st International Spring Seminar on Digital Object Identifier: 10.1109/ISSE.2008.5276616 Page(s): 496 – 500, 2008

(SM-08-01) Evaluation of nanoscale roughness measurements on a plasma treated SU-8 polymer surface by atomic force microscopy

Ferdinand Walther a, Wolfgang M. Heckl a,b, Robert W. Stark a,*

a Center for NanoScience (CeNS) and Department of Earth and Environmental Sciences, Ludwig-Maximilians-Universita¨t Munchen, Theresienstrasse 41, 80333 Munich, Germany

b Deutsches Museum, Museumsinsel 1, 80356 Munich, Germany

Applied Surface Science 254 (2008) 7290–7295

(SM-08-02) Surface modification of gel-free microchannel surface electrophoresis device for DNA identification

Lee, HH; Ku, Y JAPANESE JOURNAL OF APPLIED PHYSICS   Volume: 47   Issue: 4   Pages: 2300-2305, 2008

(SM-08-03) Surface modification of SU-8 for enhanced biofunctionality and nonfouling properties

Tao, SL; Popat, KC; Norman, JJ, et al. LANGMUIR   Volume: 24   Issue: 6   Pages: 2631-2636, 2008

(SM-08-04) Functionalization of SU-8 photoresist surfaces with IgG proteins

Gabriela Blagoi a,*, Stephan Keller a, Alicia Johansson b, Anja Boisen a, Martin Dufva a

a Department of Micro and Nanotechnology, Technical University of Denmark, DTU Nanotech, DK-2800 Kongens Lyngby, Denmark

b PhotoSolar ApS, Gregersensvej 1A, DK-2630 Taastrup, Denmark

Applied Surface Science 255,  2896–2902, 2008

(CM-08-03) Fabrication and characterization of three-dimensional carbon electrodes for lithium-ion batteries

Genis Turon Teixidor, Rabih B. Zaouk, Benjamin Y. Park, Marc J. Madou

Department of Mechanical and Aerospace Engineering, 4200 Engineering Gateway Building, University of California, Irvine, Irvine, CA 92697, USA

Journal of Power Sources Volume 183, Issue 2, 1 September 2008, Pages 730-740

(DP-08-01) Electrowetting on Superhydrophobic Surfaces: Present Status and Prospects

Jason Heikenfeld and Manjeet Dhindsa

Novel Devices Laboratory, Department of Electrical Engineering, University of Cincinnati, Cincinnati, OH 45221, USA

Journal of Adhesion Science and Technology 22 319–334, 2008

(DP-08-02) High reflective and bi-stable electrowetting displays

K. Blankenbach, A. Schmoll, A. Bitman, F. Bartels, and D. Jerosch

J. Soc. Instr. Displays 16, pp. 237–241, 2008

(DP-08-03) Microplasma Device Utilizing SU-8 Photoresist as a Barrier Rib

Sung-O Kim; Plasma Science, IEEE Transactions on Volume: 36 , Issue: 4 , Part: 1 DOI: 10.1109/TPS.2008.922939 Page(s): 1244 – 1245, 2008

(ML-08-01) A novel method to fabricate lensed optical fiber with SU-8 photoresist for efficient coupling to high-power laser diodes

Che-Hsin Lin; Yih-Tun Tseng; Chun-Ching Wu; Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on Digital Object Identifier: 10.1109/MEMSYS.2008.4443680 Page(s): 411 – 414, 2008

(ML-08-02) Inkjet printing of SU-8 for polymer-based MEMS a case study for microlenses

Fakhfouri, V.  Cantale, N.  Mermoud, G.  Kim, J.Y.  Boiko, D.  Charbon, E.  Martinoli, A.  Brugger, J. Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne

Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on page(s): 407 – 410, Jan. 2008 Tucson, AZ

(LG-07-01) SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography

A del Campo and C Greiner

Max-Planck-Institut fur Metallforschung, Heisenbergstraße 3, 70569 Stuttgart, Germany

J. Micromech. Microeng. 17 R81–R95, 2007

(LG-07-02) SU-8 as a structural material for labs-on-chips and microelectromechanical systems

Patrick Abgrall1 Veronique Conedera2 Henri Camon2 Anne-Marie Gue2 Nam-Trung Nguyen1

1Singapore-MIT Alliance, Nanyang Technological University, Singapore

2LAAS-CNRS, University of Toulouse, Toulouse, France

Electrophoresis, 28, 4539–4551, 2007

(MF-07-01) Stretching and selective immobilization of DNA in SU-8 micro- and nanochannels B. Yang, V. R. Dukkipati, D. Li, B. L. Cardozo, and S. W. Pang J. Vac. Sci. Technol. B 25, 2352 , 2007

(MF-07-02) SU-8 Buckled-type Microvalves Switched by Surface Tension Forces

Lung-Jieh Yang; Kuan-Chun Liu; Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conf. on Digital Object Identifier: 10.1109/NEMS.2007.352238 Page(s): 105 – 108, 2007

(MF-07-03) Stability Analysis and Fabrication Process of a Multiple Flow Focusing Microdevice Built in SU-8

Perdigones, F.A.; Luque, A.; Ganan-Calvo, A.M.; Quero, J.M.; Industrial Electronics, 2007. ISIE 2007. IEEE International Symposium on Digital Object Identifier: 10.1109/ISIE.2007.4375134 Page(s): 3244 – 3249, 2007

(MF-07-04) Design of Electrical Interconnect for SU-8 Microfluidic Systems

Ueda, T.; Jaffer, S.; Westwood, S.; Gray, B.L.; Electrical and Computer Engineering, 2007. CCECE 2007. Canadian Conference on Digital Object Identifier: 10.1109/CCECE.2007.8 Page(s): 5 – 7, 2007

(MF-07-05) Thick SU-8 and PDMS Three-Dimensional Enclosed Channels for Free-Standing Polymer Microfluidic Systems

Westwood, S.M.; Jaffer, S.; Lui, O.A.; Gray, B.L.; Electrical and Computer Engineering, 2007. CCECE 2007. Canadian Conference on Digital Object Identifier: 10.1109/CCECE.2007.10 Page(s): 12 – 15, 2007

(MF-07-06) Stretching and selective immobilization of DNA in SU-8 micro- and nanochannels

Yang, B.; Dukkipati, V. R.; Li, D.; Cardozo, B. L.; Pang, S. W.; Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Volume: 25 , Issue: 6 Digital Object Identifier: 10.1116/1.2806975 Page(s): 2352 – 2356, 2007

(SM-07-01) Stability of the hydrophilic behavior of oxygen plasma activated SU-8

FerdinandWalther1, Polina Davydovskaya1, Stefan Z¨urcher2, Michael Kaiser3, Helmut Herberg3, Alexander M Gigler1 and Robert WStark1

1 Center for Nanoscience CeNS and Department of Earth and Environmental Sciences,

Ludwig-Maximilians-Universit¨at M¨unchen, Theresienstr. 41, 80333 Munich, Germany

2 Laboratory for Surface Science and Technology, ETH Zurich, Wolfgang-Pauli-Strasse 10, 8093 Zurich, Switzerland

3 Munich University of Applied Sciences, Lothstr. 34, 80335 Munich, Germany

J. Micromech. Microeng. 17  524–531, 2007

(SM-07-02) Surface Modification and Direct Bonding of Different Materials Irradiated H2O Ion

Author(s): Nishimoto, K; Ishizawa, N; Ueda, H, et al. JOURN. OF ADV. MECH. DESIGN SYS. AND MANUF. Vol.: 2   Issue: 2   Pages: 197-202, 2007

(SM-07-03) A novel dry method for surface modification of SU-8 for immobilization of biomolecules in Bio-MEMS

Author(s): Joshi, M; Kale, N; Lal, R, et al. BIOSENSORS & BIOELECTRONICS   Vol. 22   Issue: 11   Pages: 2429-2435   May 15 2007

(SM-07-04) Surface modification of SU-8 photoresist for shrinkage improvement in a monolithic MEMS microstructure Author(s): Chung, CK; Hong, YZ

Department of Mechanical Engineering, Center for Micro/Nano Science and Technology, National Cheng Kung University, Taiwan, Republic of China

JOURNAL OF MICROMECHANICS AND MICROENGINEERING Vol. 17 Issue: 2 Pages:207-212 FEB 2007

(SM-07-05) Silanization and antibody immobilization on SU-8

Manoj Joshi a, Richard Pinto b, V. Ramgopal Rao b, Soumyo Mukherji a,*

a School of Biosciences and Bioengineering, Indian Institute of Technology Bombay, Mumbai, India

b Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, India

Applied Surface Science (2007)

(DP-07-01) Scalable fabrication of electrowetting displays with self-assembled oil dosing

B. Sun, K. Zhou, Y. Lao, and J. Heikenfelda_

Novel Devices Laboratory, Department of Electrical and Comp. Eng., University of Cincinnati, Cincinnati, Ohio 45221

W. Cheng

Industrial Technology Research Institute, Display Technology Center, Hsin Chu 310, Taiwan

APPLIED PHYSICS LETTERS 91, 011106, 2007

(DI-07-01) All-additive ink-jet-printed display backplanes: Materials development and integration

Ana C. Arias, Jürgen Daniel, Brent Krusor, Steve Ready, Veronica Sholin, and Robert Street Palo Alto Research Center, Electronic Materials and Devices Laboratory, 3333 Coyote Hill Rd., Palo Research Center, Palo Alto, CA 94070

(S-06-1) Dry etching release of polymer-based cantilevers with integrated electrodes S. Mouaziz, C. Imboden, G. Boero, R. Popovic and J. Brugger Microsystems Laboratory, EPFL-STI-IMM-LMIS Lausanne 1015 Switzerland International Workshop on Nanomechanical Sensors, Copenhagen, Denmark, May 7-10, 2006

(S-06-2) Surface stress measurements in liquid using SU-8 cantilevers with integrated readout Alicia Johansson, Gabriela Blagoi and Anja Boisen Department of Micro and Nanotechnology (MIC), Technical University of Denmark (DTU), Bldg. 345 east, 2800 Kgs. Lyngby, Denmark MNE 06

(S- 06-3) Fabricating multilevel SU-8 structures in a single photolithographic step using colored masking patterns J. Taff, Y. Kashte, V. Spinella-Mamo, and M. Paranjapea_ Department of Physics and GAEL Health Microsystems, Georgetown University, Washington, DC 20057 J. Vac. Sci. Technol. A 24 ?3 &, May/Jun 2006

(S-06-4) Development of 3D out-of-plane SU-8 microlenses using modified micromolding in capillaries (MIMIC) technology A. Llobera, R. Wilke, D. W. Johnson, and S. Büttgenbach Proc. SPIE 6185, 618512 (2006)

(S-06-5) SU 8 multiple layer structuring by means of maskless photolithography (DWL66) Amir A. Saghiri, Matthias Kaden, Konrad Rössler, Roel Wijnaendts, Sven Preuss, and Alexander Forozan Proc. SPIE 6110, 611003 (2006)

(S-06-6) Optimization of SU-8 processing for integrated optics Thomas A. Anhoj, Anders M. Jorgensen, Dan A. Zauner, and Jörg Hübner Proc. SPIE 6110, 611009 (2006)

(S-06-7) Grey scale electron-beam lithography in functionalized SU-8 for active optical devices S. Balslev, T. Rasmussen, P. Shi, and A. Kristensen Proc. SPIE 6110, 61100C (2006)

(S-06-8) Monolithic single mode SU-8 waveguides for integrated optics Maria Nordström, Dan A. Zauner, Anja Boisen, and Jörg Hübner Proc. SPIE 6112, 611206 (2006)

(S-06-9) Characterization of SU-8 optical multimode waveguides for integrated optics and sensing on microchip devices A. Piruska, A. A. S. Bhagat, K. Zhou, E.T.K. Peterson, I. Papautsky, and C. J. Seliskar Proc. SPIE 6112, 611207 (2006)

(S-06-10) An injection micromixer fabricated by improved SU-8 processing for biochemical microfluidic systems Changgeng Liu, Zhong-geng Ling, Kun Lian, Jost Goettert, and Josef Hormes Proc. SPIE 6112, 61120G (2006)

(S-06-11)Fabrication and test of an electrochemical microactutor Dong Eun Lee, Steven A. Soper, and Wanjun Wang Proc. SPIE 6112, 61120N (2006)

(S-06-12) Study of nano-imprint for sub-100-nm patterning by using SU-8 3000NIL resist Atsushi Sekiguchi, Yoshiyuki Kono, Satoshi Mori, Nao Honda, and Yoshihiko Hirai Proc. SPIE 6151, 61512H (2006)

(S-06-13) Development of 3D out-of-plane SU-8 microlenses using modified micromolding in capillaries (MIMIC) technology A. Llobera, R. Wilke, D. W. Johnson, and S. Büttgenbach Proc. SPIE 6185, 618512 (2006)

(S-06-14) Fabricating multilevel SU-8 structures in a single photolithographic step using colored masking patterns J. Taff, Y. Kashte, V. Spinella-Mamo, and M. Paranjape J. Vac. Sci. Technol. A 24, 742 (2006)

(S-06-15) Photothermally enabled lithography for refractive-index modulation in SU-8 photoresist Biow Hiem Ong, Xiaocong Yuan, Shaohua Tao, and Swee Chuan Tjin Opt. Lett. 31, 1367 (2006)

(S-06-16) Adhesive Wafer Bonding with SU-8 Intermediate Layers for Microfluidic Applications Viorel Dragoi, Gerald Mittendorfer, Christine Thanner, Thorsten Matthias, Thomas Glinsner, and Paul Lindner Meet. Abstr. - Electrochem. Soc. 602, 1391 (2006)

(S-06-17) Comparison of high resolution negative electron beam resists B. Bilenberg, M. Schøler, P. Shi, M. S. Schmidt, P. Bøggild, M. Fink, C. Schuster, F. Reuther, C. Gruetzner, and A. Kristensen J. Vac. Sci. Technol. B 24, 1776 (2006)

(S-06-18) Three-dimensional SU-8 structures by reversal UV imprint W. Hu, B. Yang, C. Peng, and S. W. Pang J. Vac. Sci. Technol. B 24, 2225 (2006)

(S-06-19) Adding grayscale layer to chrome photomasks David K. Poon, James M. Dykes, Chinheng Choo, Jimmy T. K. Tsui, Jun Wang, Glenn H. Chapman, Yuqiang Tu, Patrick Reynolds, and Andrew Zanzal Proc. SPIE 6349, 634931 (2006)

(S-06-20) Development of a MEMS-fabricated SU-8 device for 2D separations K. P. Bloschock, T. W. Schneider, Abul Hussam, and E. R. Van Keuren Proc. SPIE 6380, 63800I (2006)

(S-06-21) Adhesive Wafer Bonding with SU-8 Intermediate Layers for Microfluidic Applications Viorel Dragoi, Gerald Mittendorfer, Christine Thanner, Thorsten Matthias, Thomas Glinsner, and Paul Lindner ECS Trans. 3, (6) 369 (2006)

(S-06-22) Multiple level nanochannels fabricated using reversal UV nanoimprint B. Yang and S. W. Pang J. Vac. Sci. Technol. B 24, 2984 (2006)

(S-06-23) CMOS compatible integration of three-dimensional microfluidic systems based on low-temperature transfer of SU-8 films Zheng-chun Peng; Zhong-geng Ling; Tondra, M.; Chang-geng Liu; Min Zhang; Kun Lian; Goettert, J.; Hormes, J.; Microelectromechanical Systems, Volume 15, Issue 3, June 2006 Page(s):708 - 716

(S-06-24) Polymer-based cantilevers with integrated electrodes Mouaziz, S.; Boero, G.; Popovic, R.S.; Brugger, J.; Microelectromechanical Systems, Volume 15, Issue 4, Aug. 2006 Page(s):890 - 895

(S-06-25) Numerical simulation of SU-8 optical accelerometers Llobera, A.; Cadarso, V.J.; Seidemann, V.; Buttgenbach, S.; Plaza, J.A.; Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference, 24-26 April 2006 Page(s):1 - 8

(S-06-26) Metal foundation construction to consolidate electroplated structures for successful removal of SU-8 mould Cui, F.; Chen, W.-Y.; Zhao, X.-L.; Jing, X.-M.; Wu, X.-S.; Electronics Letters; Volume 42, Issue 12, 8 June 2006 Page(s):690 - 691

(S-06-27) UV-sensitive photofunctional device using evanescent field absorption between SU-8 polymer optical waveguide and photochromic dye Jang, S.-W.; Son, S.-J.; Do-Eok Kim; Dae-Hyuk Kwon; Sung-Hoon Kim; Young-Hyun Lee; Shin-Won Kang; Photonics Technology Letters, IEEE; Volume 18, Issue 1, Jan. 1, 2006 Page(s):82 - 84

(S-06-28) Multidirectional UV Lithography for Complex 3-D MEMS Structures Yoon, Y.-K.; Park, J.-H.; Allen, M.G.; Microelectromechanical Systems, Volume 15, Issue 5, Oct 2006 Page(s):1121 - 1130

(S-06-29) A Single-Layer Multiple Degree-Of-Freedom PDMS-On-Silicon Dynamic Focus Micro-Lens Tung, Y.-C.; Kurabayashi, K.; Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on 22-26 Jan. 2006 Page(s):838 - 841

(S-06-30) Micromachined SU-8 Probe Integrated with Film-bulk-acoustic Resonant Mass Sensor Hao Zhang; Wei Pang; Eun Sok Kim; Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on 22-26 Jan. 2006 Page(s):82 - 85

(S-06-31) Polymeric MOEMS Variable Optical Attenuator Llobera, A.; Villanueva, G.; Cadarso, V. J.; Battgenbach, S.; Plaza, J. A.; Photonics Technology Letters, IEEE Volume 18, Issue 22, Nov.15, 2006 Page(s):2425 - 2427

(S-06-32) Single-mode rib optical waveguides on SOG/SU-8 polymer and integrated Mach-Zehnder for designing thermal sensors Pelletier, N.; Beche, B.; Gaviot, E.; Camberlein, L.; Grossard, N.; Polet, F.; Zyss, J.; Sensors Journal, IEEE; Volume 6, Issue 3, June 2006 Page(s):565 - 570

(S-06-33) Corrections to ?UV-Sensitive Photofunctional Device Using Evanescent Field Absorption Between SU-8 Polymer Optical Waveguide and Photochromic Dye ? Jang, S.-W.; Son, S.-J.; Kim, D.-E.; Kwon, D.-H.; Kim, S.-H.; Lee, Y.-H.; Kang, S.-W.; Photonics Technology Letters, IEEE Volume 18, Issue 11, June 2006 Page(s):1282 - 1282 Digital Object Identifier 10.1109/LPT.2006.876889

(S-06-34) Fabrication and Characterization of Three-Dimensional Microlens Arrays in Sol-Gel Glass Orhan, J.-B.; Parashar, V.K.; Sayah, A.; Gijs, M.A.M.; Microelectromechanical Systems, Journal of Volume 15, Issue 5, Oct 2006 Page(s):1159 - 1164

(S-06-35) Fabrication of PZT sol gel composite ultrasonic transducers using batch fabrication micromolding Guofeng Pang; Sayer, M.; Lockwood, G.R.; Watt, M.; Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on Volume 53, Issue 9, Sept. 2006 Page(s):1679 - 1684

(S-06-36) Three-Dimensional Metal Patterning over Nanostructures by Reversal Imprint Peng, C.; Pang, S.W.; Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference Volume 1, 17-20 June 2006 Page(s):59 - 61

(S-06-37) Integration of SOI and SU-8 in a Surface-Micromachining-like Process and Its Application in Micro-Optical Systems Yi Chiu; Chung-Wei Wu; Zhi-Wei Zhuang; Jin-Chern Chiou; Han-Ping D. Shieh; Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference 21-24 Aug. 2006 Page(s):140 - 141

(S-06-38) Rapid Fabrication Process for High Aspect-Ratio Embedded Microchannels with Orifices Usinga Single SU-8 Layer Onamask Suzuki, T.; Tokuda, T.; Yamamoto, H.; Ohoka, M.; Kanno, I.; Washizu, M.; Kotera, H.; Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference 22-26 Jan. 2006 Page(s):346 - 349

(S-06-39) Temperature effects in Au piezoresistors integrated in SU-8 cantilever chips A Johansson, O Hansen, J Hales and A Boisen J. Micromech. Microeng. 16 No 12 (December 2006) 2564-2569

(S-06-40) An all SU-8 microfluidic chip with built-in 3D fine microstructures Hironobu Sato, Hirokazu Matsumura, Satoshi Keino and Shuichi Shoji J. Micromech. Microeng. 16 No 11 (November 2006) 2318-2322

(S-06-41) AFM-measured surface roughness of SU-8 structures produced by deep x-ray lithography K D Vora, B Lochel, E C Harvey, J P Hayes and A G Peele J. Micromech. Microeng. 16 No 10 (October 2006) 1975-1983

(S-06-42) A planar self-sacrificial multilayer SU-8-based MEMS process utilizing a UV-blocking layer for the creation of freely moving parts I G Foulds and M Parameswaran J. Micromech. Microeng. 16 No 10 (October 2006) 2109-2115

(S-06-43) Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography Toshiaki Kondo, Saulius Juodkazis, Vygantas Mizeikis, Shigeki Matsuo and Hiroaki Misawa New J. Phys. 8 No 10 (October 2006) 250

(S-06-44) High pressure-resistant SU-8 microchannels for monolithic porous structure integration Julien Carlier, Katarzyna Chuda, Steve Arscott, Vincent Thomy, Bernard Verbeke, Xavier Coqueret, Jean Christophe Camart, Christian Druon and Pierre Tabourier J. Micromech. Microeng. 16 No 10 (October 2006) 2211-2219

(S-06-45) The effect of soft bake temperature on the polymerization of SU-8 photoresist Thomas A Anhoj, Anders M Jorgensen, Dan A Zauner and Jörg Hübner J. Micromech. Microeng. 16 No 9 (September 2006) 1819-1824

(S-06-46) Using imprinting technology to fabricate three-dimensional devices from moulds of thermosetting polymer patterns Jem-Kun Chen, Fu-Hsiang Ko, Chia-Hao Chan, Chih-Feng Huang and Feng-Chih Chang Semicond. Sci. Technol. 21 No 9 (September 2006) 1213-1220

(S-06-47) Fabrication of metallic patterns by microstencil lithography on polymer surfaces suitable as microelectrodes in integrated microfluidic systems Nao Takano, Lianne M Doeswijk, Marc A F van den Boogaart, Janko Auerswald, Helmut F Knapp, Olivier Dubochet, Thomas Hessler and Jürgen Brugger J. Micromech. Microeng. 16 No 8 (August 2006)1606-1613

(S-06-48) IR laser-assisted micro/nano-imprinting Chun-Hung Chen, Chuan-Pu Liu, Yung-Chun Lee, Fei-Bin Hsiao, Cheng-Yu Chiu, Ming-Hung Chung and Ming-Hsueh Chiang J. Micromech. Microeng. 16 No 8 (August 2006) 1463-1467

(S-06-49) Improved polymer glass adhesion through micro-mechanical interlocking M P Larsson and M M Ahmad J. Micromech. Microeng. 16 No 6 (June 2006) S161-S168

(S-06-50) Creating multi-layered structures with freestanding parts in SU-8 Frederik Ceyssens and Robert Puers J. Micromech. Microeng. 16 No 6 (June 2006) S19-S23

(S-06-51) New 'monolithic' templates and improved protocols for soft lithography and microchip fabrication Antoine Pallandre, Debjani Pal, Bertrand de Lambert, Jean-Louis Viovy and Claus Fütterer J. Phys.: Condens. Matter 18 No 18 (10 May 2006) S665-S676

(S-06-52) Microfluidic-optical integrated CMOS compatible devices for label-free biochemical sensing F J Blanco, M Agirregabiria, J Berganzo, K Mayora, J Elizalde, A Calle, C Dominguez and L M Lechuga J. Micromech. Microeng. 16 No 5 (May 2006) 1006-1016

(S-06-53) Three-dimensional microfabrication in negative resist using printed masks Daniel Haefliger and Anja Boisen J. Micromech. Microeng. 16 No 5 (May 2006) 951-957

(S-06-54) Adhesive bonding with SU-8 at wafer level for microfluidic devices Liming Yu, Francis E H Tay, Guolin Xu, Bangtao Chen, Marioara Avram and Ciprian Iliescu J. Phys.: Conf. Ser. 34 (2006) 776-781

(S-06-55) A novel and simple fabrication method of embedded SU-8 micro channels by direct UV lithography C Fu, C Hung and H Huang J. Phys.: Conf. Ser. 34 (2006) 330-335

(S-06-56) Novel exposure methods based on reflection and refraction effects in the field of SU-8 lithography Won-Jong Kang, Erik Rabe, Stefan Kopetz and Andreas Neyer J. Micromech. Microeng. 16 No 4 (April 2006) 821-831

(S-06-57) Low temperature adhesion bonding for BioMEMS Jörg Kentsch, Stefanie Breisch and Martin Stelzle J. Micromech. Microeng. 16 No 4 (April 2006)802-807

(S-06-58) Electrically conducting probes with full tungsten cantilever and tip for scanning probe applications J A J Steen, J Hayakawa, T Harada, K Lee, F Calame, G Boero, A J Kulik and J Brugger Nanotechnology 17 No 5 (14 March 2006)1464-1469

(S-06-59) SU-8 cantilever chip interconnection A Johansson, J Janting, P Schultz, K Hoppe, I N Hansen and A Boisen J. Micromech. Microeng. 16 No 2 (February 2006) 314-319

(S-06-60) Fabrication of multi-layer SU-8 microstructures Alvaro Mata, Aaron J Fleischman and Shuvo Roy J. Micromech. Microeng. 16 No 2 (February 2006) 276-284

(S-06-61) A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films Patrick Abgrall, Christine Lattes, Véronique Conédéra, Xavier Dollat, Stéphane Colin and Anne Marie Gué J. Micromech. Microeng. 16 No 1 (January 2006) 113-121

(S-05-1) Interconnected multilevel microfluidic channels fabricated using low-temperature bonding of SU-8 and multilayer lithography Zheng-Chun Peng, Zhong-Geng Ling, Jost Goettert, Josef Hormes, and Kun Lian Proc. SPIE 5718, 209 (2005)

(S-05-2) Microfabrication of an integrated SU-8 waveguide with an embedded focusing lens for application in single-molecule detection (SMD) Ren Yang, Steven A. Soper, and Wanjun Wang Proc. SPIE 5718, 54 (2005)

(S-05-3) Fabrication of out-of-plane refractive concave and convex microlens arrays Ren Yang, Steven A. Soper, and Wanjun Wang Proc. SPIE 5717, 134 (2005)

(S-05-4) Fabrication of microstructures with different aspect ratios in a single layer Yao Fu, Erol C. Harvey, and Muralidhar K. Ghantasala Proc. SPIE 5650, 156 (2005)

(S-05-5) Selective adhesive bonding with SU-8 for zero-level-packaging Danny S. Reuter, Andreas Bertz, Gunther Schwenzer, and Thomas Gessner Proc. SPIE 5650, 163 (2005)

(S-05-6) Fabrication of an integrated microfluidic and surface acoustic wave device for fluid analysis David A. Karla, Anthony S. Holland, Gary Rosengarten, and Kourosh Kalantar-Zadeh Proc. SPIE 5650, 189 (2005)

(S-05-7) Fully integrated optical systems for lab-on-a-chip applications Soren Balslev, Brian Bilenberg, Daniel Nilsson, Anders M. Jorgensen, Anders Kristensen, Oliver Geschke, Jorg P. Kutter, Klaus B. Mogensen, and Detlef Snakenborg Proc. SPIE 5730, 211 (2005)

(S-05-8) Optimized SU-8 UV-lithographical process for a Ka-band filter fabrication Peng Jin, Kyle Jiang, Jiubin Tan, and M. J. Lancaster Proc. SPIE 5852, 352 (2005)

(S-05-9) SU 8 used as optical waveguide in integrated optical microsensor for biological applications Raluca M ller et al. Proc. SPIE 5972, 59720Z (2005)

(S-05-10) Characterization of optical accelerometers based on SU-8 A. Llobera, V. Seidemann, J. A. Plaza, V. J. Cadarso, and S. Büttgenbach Proc. SPIE 5956, 59560W (2005)

(S-05-11) Low-stress ultra-thick SU-8 UV photolithography process for MEMS Bo Li, Miao Liu, and Quanfang Chen J. Microlith., Microfab., Microsyst. 4, 043008 (2005)

(S-05-12) Functionalized SU-8 patterned with x-ray lithography S. Balslev and F. Romanato J. Vac. Sci. Technol. B 23, 2910 (2005)

(S-05-13) Nanofabrication by direct laser writing and holography (Invited Paper) Kock K. Seet, Vygandas Jarutis, Saulius Juodkazis, and Hiroaki Misawa Proc. SPIE 6050, 60500S (2005)

(S-05-14) Process optimisation for compact high aspect ratio SU-8 microstructures using x-ray lithography K. D. Vora, B. Y. Shew, E. C. Harvey, J. P. Hayes, and A. G. Peele Proc. SPIE 6037, 603701 (2005)

(S-05-15) Visco-elastic properties of micron-thick SU-8 polymers measured by two different types of uniaxial tensile tests Namazu, T.; Inoue, S.; Takio, K.; Fujita, T.; Maenaka, K.; Koterazawa, K.; Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on 30 Jan.-3 Feb. 2005 Page(s):447 – 450

(S-05-16) Ultra-sensitive biosensor based on SU-8 planar interferometer Shew, B.Y.; Tsai, Y.H.; Kuo, C.H.; Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on Volume 2, 5-9 June 2005 Page(s):1784 - 1787 Vol. 2

(S-05-17) Polymer-core conductor approaches for RF MEMS Yong-Kyu Yoon; Jin-Woo Park; Allen, M.G.; Microelectromechanical Systems, Journal of Volume 14, Issue 5, Oct. 2005 Page(s):886 - 894

(S-05-18) CMP of PC, PMMA and SU-8 Polymers Zhong, Z.W.; Wang, Z.F.; Zirajutheen, B.M.P.; Tan, Y.S.; Tan, Y.H.; Polymers and Adhesives in Microelectronics and Photonics, Polytronic, 2005. Polytronic 2005. 5th International Conference on 23-26 Oct. 2005 Page(s):58 - 62

(S-05-19) Two-Photon Laser Lithography of photonic microstructures in photoresist SU-8 Mizeikis, V.; Seet, K.-K.; Juodkazis, S.; Jarutis, V.; Misawa, H.; Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on 30-02 Aug. 2005 Page(s):1735 - 1736

(S-05-20) Polymer microlenses with modified micromolding in capillaries (MIMIC)technology Llobera, A.; Wilke, R.; Johnson, D.W.; Buttgenbach, S.; Photonics Technology Letters, IEEE Volume 17, Issue 12, Dec. 2005 Page(s):2628 - 2630

(S-05-21) Development of a multi-layer SU-8 process for terahertz frequency waveguide blocks Smith, C.H., III; Haiyong Xu; Barker, N.S.; Microwave Symposium Digest, 2005 IEEE MTT-S International 12-17 June 2005 Page(s):4 pp.

(S-05-22) 10Gbps multi-mode waveguide for optical interconnect Yi-Ming Chen; Cheng-Lin Yang; Yao-Ling Cheng; Hsiu-Hsiang Chen; Ying-Chih Chen; Yen Chu; Tsung-Eong Hsieh; Electronic Components and Technology Conference, 2005. Proceedings. 55th 31 May-3 June 2005 Page(s):1739 - 1743 Vol. 2

(S-05-23) High frequency design and characterization of SU-8 based conductor backed coplanar waveguide transmission lines Mbairi, F.D.; Hesselbom, H.; Advanced Packaging Materials: Processes, Properties and Interfaces, 2005. Proceedings. International Symposium on 16-18 March 2005 Page(s):243 - 248

(S-05-24) Electrothermally Activated SU-8 Microgripper for Single Cell Manipulation in Solution Chronis, N.; Lee, L.P.; Microelectromechanical Systems, Journal of Volume 14, Issue 4, Aug. 2005 Page(s):857 - 863

(S-05-25) A novel technology for fabricating microneedle of SU-8 Zhan Zhao; Ning Qin; Li Wang; Bojun Zhang; Information Acquisition, 2005 IEEE International Conference on; 27 June-3 July 2005 Page(s):4 pp.

(S-05-26) Development of an SU-8 Fabry-Perot blood pressure sensor Melamud, R.; Davenport, A.A.; Hill, G.C.; Chan, I.H.; Declercq, F.; Hartwell, P.G.; Pruitt, B.L.; Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on 30 Jan.-3 Feb. 2005 Page(s):810 – 813

(S-05-27) A simple and low-cost fabrication of polymeric vertical microlens using dip method Chih-Chao Yang; Te-Chin Peng; Yun-Hsun Huang; Meng-Chyi Wu; Chong-Long Ho; Wen-Jeng Ho; Photonics Technology Letters, IEEE; Volume 17, Issue 3, Mar 2005 Page(s):603 - 605

(S-05-28) 3D self-assembling of SU-8 microstructures on silicon by plasma induced compressive stress Bureau, J.-B.; Legrand, B.; Collard, D.; Buchaillot, L.; Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on; Volume 1, 5-9 June 2005 Page(s):19 - 22 Vol. 1

(S-05-29) Integrated Mach-Zehnder interferometer on SU-8 polymer for designing pressure sensors Pelletier, N.; Beche, B.; Tahani, N.; Camberlein, L.; Gaviot, E.; Goullet, A.; Landesman, J.-P.; Zyss, J.; Sensors, 2005 IEEE; 30 Oct.-3 Nov. 2005 Page(s):4 pp

(S-05-30) All plastic microfluidic device with built-in 3-D fine microstructures Matsumura, H.; Sato, H.; Houshi, Y.; Shoji, S.; Microprocesses and Nanotechnology Conference, 2005 International 25-28 Oct. 2005 Page(s):270 - 271

(S-05-31) Micro-mirror arrays for adaptive optics fabricated in polymer technology Friese, C.; Zappe, H.; Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on Volume 2, 5-9 June 2005 Page(s):1342 - 1345 Vol. 2

(S-05-32) Selective formation of porous silicon using silicon nitride and SU-8 masks for electroluminescence applications Celigiieta, I.; Arana, S.; Gracia, F.J.; Castano, E.; Electron Devices, 2005 Spanish Conference on 2-4 Feb. 2005 Page(s):331 - 334

(S-05-33) SU-8 lift-off patterned silicone chemical vapor sensor arrays Wong, V.T.S.; Huang, A.; Chih-Ming Ho; Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on 30 Jan.-3 Feb. 2005 Page(s):754 - 757

(S-05-34) Contact printed masks for 3D microfabrication in negative resists Haefliger, D.; Boisen, A.; Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on 30 Jan.-3 Feb. 2005 Page(s):556 - 559

(S-05-35) Flow rate measurement inside polymer microfluidic systems using carbon nanotube sensors Fung, C.K.M.; Sin, M.L.Y.; Lei, T.K.F.; Chow, W.W.Y.; Lai, K.W.C.; Li, W.J.; Sensors, 2005 IEEE; 30 Oct.-3 Nov. 2005 Page(s):4 pp

(S-05-36) Design and Experimental Validation of A SU-8 Based Micro-Psychrometer Giordani, N.; Camberlein, L.; Gaviot, E.; Polet, F.; Pelletier, N.; Beche, B.; Instrumentation and Measurement Technology Conference, 2005. IMTC 2005. Proc of the IEEE Volume 3, 16-19 May 2005 Page(s):1848 - 1851

(S-05-37) Three-dimensional Spiral Architecture Photonic Crystals Obtained in a Negative Photoresist SU-8 by Direct Laser Writing Seet, K.K.; Mizeikis, V.; Juodkazis, S.; Misawa, H.; Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on 30-02 Aug. 2005 Page(s):1733 - 1734

(S-05-38) Rapid manufacturing of embedded microchannels from a single layer of SU-8, and determining the dependence of SU-8 young's modulus on exposure dose with a laser acoustic technique Yu, H.; Balogun, O.; Li, B.; Murray, T.W.; Zhang, X.; Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on 30 Jan.-3 Feb. 2005 Page(s):654 - 657

(S-05-39) A novel method for the fabrication of high-aspect ratio C-MEMS structures Chunlei Wang; Guangyao Jia; Taherabadi, L.H.; Madou, M.J.; Microelectromechanical Systems, Journal of Volume 14, Issue 2, April 2005 Page(s):348 - 358

(S-05-40) Self-actuated polymeric valve for autonomous sensing and mixing Haefliger, D.; Marie, R.; Boisen, A.; Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on; Volume 2, 5-9 June 2005 Page(s):1569 - 1572 Vol. 2

(S-05-41) Dead-end injection molding of polymeric microcantilever arrays Wan Ho Song; Hierlemann, A.; Lichtenberg, J.; Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on Volume 2, 5-9 June 2005 Page(s):2040 - 2043 Vol. 2

(S-05-42) Replication of microneedle arrays using vacuum casting and hot embossing Trautmann, A.; Heuck, F.; Mueller, C.; Ruther, P.; Paul, O.; Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on Volume 2, 5-9 June 2005 Page(s):1420 - 1423 Vol. 2

(S-05-43) Characterization and modeling of a liquid-vapor phase change membrane actuator with an integrated SU-8 micro capillary wicking structure Whalen, S.A.; Won, S.Y.; Richards, R.F.; Bahr, D.F.; Richards, C.D.; Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on; Volume 1, 5-9 June 2005 Page(s):342 - 347 Vol. 1

(S-05-44) A SU-8 microfluidic total analysis system integrating silicon photodiodes and buried waveguides de la Fuente, P.; Etxeberria, J.A.; Berganzo, J.; Arroyo, M.T.; Castano, E.; Gracia, F.J.; Ruano-Lopez, J.M.; Electron Devices, 2005 Spanish Conference on; 2-4 Feb. 2005 Page(s):461 - 464

(S-05-45) A lateral, self-cleaning, direct contact MEMS switch Yong Shi; Sang-Gook Kim; Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on 30 Jan.-3 Feb. 2005 Page(s):195 - 198

(S-05-46) Geometric Optimization of SU-8 Piezoresistive Cantilever Sensors for Biochemical Applications Sukuabol, S.; Sood, D.K.; Rosengarten, G.; Intelligent Sensors, Sensor Networks and Information Processing Conference, 2005. Proceedings of the 2005 International Conference on 5-8 Dec. 2005 Page(s):247 - 252

(S-05-47) Fabrication of Robust 2-D and 3-D Microfluidic Networks for Lab-on-a-Chip Bioassays Yasukawa, T.; Glidle, A.; Nomura, M.; Cooper, J.M.; Microelectromechanical Systems, Journal of Volume 14, Issue 4, Aug. 2005 Page(s):839 - 846 Digital Object Identifier 10.1109/JMEMS.2005.846358

(S-05-48) Prototype development for chip-chip interconnection by multimode waveguide Pong, B.L.S.; Pamidigantham, R.; Premachandran, C.S.; Electronic Packaging Technology Conference, 2005. EPTC 2005. Proceedings of 7th Volume 2, 7-9 Dec. 2005 Page(s):4 pp. Digital Object Identifier 10.1109/EPTC.2005.1614453

(S-05-49) Development of a monolithic total internal reflection-based biochip utilizing a microprism array for fluorescence sensing Shih-Hao Huang and Fan-Gang Tseng J. Micromech. Microeng. 15 No 12 (December 2005) 2235-2242

(S-05-50) Single mode solid state distributed feedback dye laser fabricated by gray scale electron beam lithography on a dye doped SU-8 resist S Balslev, T Rasmussen, P Shi and A Kristensen J. Micromech. Microeng. 15 No 12 (December 2005) 2456-2460

(S-05-51) Manufacturing tolerances for UV LIGA using SU-8 resist Ronald A Lawes J. Micromech. Microeng. 15 No 11 (November 2005) 2198-2203

(S-05-52) Improved adhesion in hybrid Si-polymer MEMS via micromechanical interlocking M P Larsson, R R A Syms and A G Wojcik J. Micromech. Microeng. 15 No 11 (November 2005) 2074-2082

(S-05-53) Fabrication of 3D polymer microstructures using electron beam lithography and nanoimprinting technologies Kuo-Shen Chen, I-Kuan Lin and Fu-Hsang Ko J. Micromech. Microeng. 15 No 10 (October 2005) 1894-1903

(S-05-54) SU-8 Ka-band filter and its microfabrication K Jiang, M J Lancaster, I Llamas-Garro and P Jin J. Micromech. Microeng. 15 No 8 (August 2005) 1522-1526

(S-05-55) The fabrication and test of a square prism shaped dye micro laser based on the SU-8 molding process Yigui Li, Jinquan Liu and Susumu Sugiyama J. Micromech. Microeng. 15 No 8 (August 2005) 1571-1575

(S-05-56) Multi-layer SU-8 lift-off technology for microfluidic devices Benjamin Bohl, Reinhard Steger, Roland Zengerle and Peter Koltay J. Micromech. Microeng. 15 No 6 (June 2005) 1125-1130

(S-05-57) Two-photon lithography of nanorods in SU-8 photoresist Saulius Juodkazis, Vygantas Mizeikis, Kock Khuen Seet, Masafumi Miwa and Hiroaki Misawa Nanotechnology 16 No 6 (June 2005) 846-849

(S-05-58) Ultra-deep x-ray lithography of densely packed SU-8 features: II. Process performance as a function of dose, feature height and post exposure bake temperature Charles Becnel, Yohannes Desta and Kevin Kelly J. Micromech. Microeng. 15 No 6 (June 2005) 1249-1259

(S-05-59) The development of a microgripper with a perturbation-based configuration design method Hyeun-Seok Choi, Dong-Chan Lee, Seung-Soo Kim and Chang-Soo Han J. Micromech. Microeng. 15 No 6 (June 2005) 1327-1333

(S-05-60) Reinforcement of PDMS masters using SU-8 truss structures Amitha Govindaraju, Anirban Chakraborty and Cheng Luo J. Micromech. Microeng. 15 No 6 (June 2005) 1303-1309

(S-05-61) Ultra-deep x-ray lithography of densely packed SU-8 features: I. An SU-8 casting procedure to obtain uniform solvent content with accompanying experimental results Charles Becnel, Yohannes Desta and Kevin Kelly J. Micromech. Microeng. 15 No 6 (June 2005) 1242-1248

(S-05-62) Specification of mechanical support structures to prevent SU-8 stiction in high aspect ratio structures K D Vora, B Y Shew, E C Harvey, J P Hayes and A G Peele J. Micromech. Microeng. 15 No 5 (May 2005) 978-983

(S-05-63) X-ray micromachining SU-8 resist for a terahertz photonic filter Bor-Yuan Shew, Han-Chieh Li, Ci-Ling Pan and Cheng-Hao Ko J. Phys. D: Appl. Phys. 38 No 7 (7 April 2005) 1097-1103

(S-05-64) Scum-free patterning of SU-8 resist for electroforming applications M Agarwal, R A Gunasekaran, P Coane and K Varahramyan J. Micromech. Microeng. 15 No 1 (January 2005) 130-135

(S-05-65) Uncrosslinked SU-8 as a sacrificial material Charles Chung and Mark Allen J. Micromech. Microeng. 15 No 1 (January 2005) N1-N5

(S-04-1) Microaccelerometers Using Cured SU-8 as Structural Material Seok Jae Jeong and Wanjun Wang Louisiana State University Baton Rouge, LA 70803, USA MEMS/MOEMS Components and Their Applications Proc. SPIE 5344, 115 (2004)

(S-04-2) Low-stressed high-aspect-ratio ultrathick SU-8 UV-LIGA process for the fabrication of a micro heat exchanger Bo Li and Quanfang Chen Proc. SPIE 5344, 147 (2004)

(S-04-3) Fabrication of out-of-plane SU-8 refractive microlens using direct lithography method Ren Yang and Wanjun Wang Proc. SPIE 5346, 151 (2004)

(S-04-4) Microphotonic systems utilizing SU-8 Raymond C. Rumpf and Eric G. Johnson Proc. SPIE 5346, 64 (2004)

(S-04-5) Novel low-temperature CMOS-compatible full-wafer-bonding process for the fabrication of 3D embedded microchannels using SU-8 Francisco J. Blanco, Maria Agirregabiria, Maria Tijero, Javier Berganzo, Jorge Garcia, Maria Arroyo, Jesus M. Ruano, Inigo Aramburu, and Kepa Mayora Proc. SPIE 5276, 131 (2004)

(S-04-6) Patterning of SU-8 resist structures using CF4 Kaushal D. Vora, Anthony S. Holland, Muralidhar K. Ghantasala, and Arnan Mitchell Proc. SPIE 5276, 162 (2004)

(S-04-7) Dry release of polymer structures with anti-sticking layer M. C. Cheng, A. P. Gadre, J. A. Garra, A. J. Nijdam, C. Luo, T. W. Schneider, R. C. White, J. F. Currie, and M. Paranjape J. Vac. Sci. Technol. A 22, 837 (2004)

(S-04-8) Design and test of a microfabricated SU-8 optical scanner Wei-Chih Wang and Reynold R. Panergo Proc. SPIE 5394, 280 (2004)

(S-04-9) An SU-8 liquid cell for surface acoustic wave biosensors Laurent A. Francis, Jean-Michel Friedt, Carmen Bartic, and Andrew Campitelli Proc. SPIE 5455, 353 (2004)

(S-04-10) Study on the postbaking process and the effects on UV lithography of high aspect ratio SU-8 microstructures John D. Williams and Wanjun Wang J. Microlithogr. Microfabrication, Microsyst. 3, 563 (2004)

(S-04-11) Ultrathick SU-8 fabrication for microreciprocating engines Peng Jin, Kyle Jiang, and Nianjun Sun J. Microlithogr. Microfabrication, Microsyst. 3, 569 (2004)

(S-04-12) C-MEMS for the Manufacture of 3D Microbatteries Chunlei Wang, Lili Taherabadi, Guangyao Jia, Marc Madou, Yuting Yeh, and Bruce Dunn Electrochem. Solid-State Lett. 7, A435 (2004)

(S-04-13) Polymer-based lab-on-a-chip lasers A. Kristensen, S. Balslev, B. Bilenberg, M. Gersborg-Hansen, and D. Nilsson Proc. SPIE 5591, 64 (2004)

(S-04-14) Neural Guidance by Open-Top SU-8 Microfluidic Channel Yi-Chung Lo; Chia-Sheng Huang; Wensyang Hsu; Chaoen Wang; MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on 25-27 Aug. 2004 Page(s):671 - 674

(S-04-15) Characterization of low-temperature SU-8 photoresist processing for MEMS applications Sang Jeen Hong; Seungkeun Choi; Yoonsu Choi; Allen, M.; May, G.S.; Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop 4-6 May 2004 Page(s):404 - 408

(S-04-16) A silicon-based bulk micro-machined microelectrode biosensor with SU-8 micro reaction pool Jingwei Liu; Shanhong Xia; Jinghong Han; Chao Bian; Shaofeng Chen; Information Acquisition, 2004. Proceedings. International Conference on 21-25 June 2004 Page(s):199 - 204

(S-04-17) Packaging of devices for topside cooling by replacing air-bridges with Su-8 polymer bridges [MESFET example] Wright, J.I.; Fillion, R.; Meyer, L.; Shaddock, D.; Advanced Packaging Materials: Processes, Properties and Interfaces, 2004. Proceedings. 9th International Symposium on; 2004 Page(s):63 - 68

(S-04-18) Integrated optical Mach-Zehnder on SU-8 polymer for designing thermal sensors Pelletier, N.; Beche, B.; Camberlein, L.; Gaviot, E.; Giordani, N.; Zyss, J.; Sensors, 2004. Proceedings of IEEE24-27 Oct. 2004 Page(s):868 - 871 vol.2

(S-04-19) Polymeric microcombustors for solid-phase conductive fuels Yanzhu Zhao; English, B.A.; Yoonsu Choi; DiBiaso, H.; Guang, Yuan.; Allen, M.G.; Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS) 2004 Page(s):498 - 501

(S-04-20) Fully integrated optical system for lab-on-a-chip applications Balslev, S.; Bilenberg, B.; Geschke, O.; Jorgensen, A.M.; Kristensen, A.; Kutter, J.P.; Mogensen, K.B.; Snakenborg, D.; Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS) 2004 Page(s):89 - 92

(S-04-21) Flexible optical waveguide film fabrications and optoelectronic devices integration for fully embedded board-level optical interconnects Choi, C.; Lin, L.; Yujie Liu; Jinho Choi; Li Wang; Haas, D.; Magera, J.; Chen, R.T.; Lightwave Technology, Journal of; Volume 22, Issue 9, Sept. 2004 Page(s):2168 - 2176

(S-04-22) Fiber attachment for waveguide based devices using V-grooves made in silicon Istrate, G.; Kusko, M.; Podaru, C.; Manea, E.; Schiopip, P.; Semiconductor Conference, 2004. CAS 2004 Proceedings. 2004 International Volume 1, 4-6 Oct. 2004 Page(s):

(S-04-23) Fabrication of microfluidic chip and its application Du Liqun; Liu Chong; Luo Yi; Lou Zhifeng; Chu Denan; Wen Min; Chen Rong; Micro-Nanomechatronics and Human Science, 2004 and The Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004. Proceedings of the 2004 International Symposium on 31 Oct.-3 Nov. 2004 Page(s):237 - 242

(S-04-24) Wafer-level-package for Bulk Acoustic Wave (BAW) filters Franosch, M.; Oppermann, K.-G.; Meckes, A.; Nessler, W.; Aigner, R.; Microwave Symposium Digest, 2004 IEEE MTT-S International Volume 2, 6-11 June 2004 Page(s):493 - 496 Vol.2

(S-04-25) Fabrication of the 3-D SU-8 fine micromesh and electroplated Ni micromesh structures Sato, H.; Houshi, Y.; Otsuka, T.; Shoji, S.; Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International Oct. 27-29, 2004 Page(s):304 - 305

(S-04-26) Fabrication of silicon-based bulk micro-machined amperometric microelectrode biosensor Jingwei Liu; Jinghong Han; Shanhong Xia; Chao Bian; Yuanyuan Xu; Shaofeng Chen; Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference onVolume 3, 18-21 Oct. 2004 Page(s):1784 - 1787 vol.3 Digital Object Identifier 10.1109/ICSICT.2004.1435179

(S-04-27) Integration of microfluidic channels and optical waveguides using low-cost polymer microfabrication techniques Mitchell, A.; Holland, A.; Vora, K.; Ghantasala, M.K.; Biophotonics/Optical Interconnects and VLSI Photonics/WBM Microcavities, 2004 Digest of the LEOS Summer Topical Meetings 28-30 June 2004 Page(s):2 pp. Digital Object Identifier 10.1109/LEOSST.2004.1338655

(S-04-28) High-resolution patterning and transfer of thin PDMS films: fabrication of hybrid self-sealing 3D microfluidic systems Kloter, U.; Schmid, H.; Wolf, H.; Michel, B.; Juncker, D.; Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS) 2004 Page(s):745 - 748 Digital Object Identifier 10.1109/MEMS.2004.1290692

(S-04-29) High-aspect-ratio tapered structures using an integrated lens technique Jung-Hwan Park; Yong-Kyu Yoon; Prausnitz, M.R.; Allen, M.G.; Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS) 2004 Page(s):383 - 386 Digital Object Identifier 10.1109/MEMS.2004.1290602

(S-04-30) Microchip flow cytometer with integrated polymer optical elements for measurement of scattered light Wang, Z.; El-Ali, J.; Perch-Nielsen, I.R.; Mogensen, K.B.; Snakenborg, D.; Kutter, J.P.; Wolff, A.; Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS) 2004 Page(s):367 - 370 Digital Object Identifier 10.1109/MEMS.2004.1290598

(S-04-31) Rendering SU-8 hydrophilic to facilitate use in micro channel fabrication Maria Nordström, Rodolphe Marie, Montserrat Calleja and Anja Boisen J. Micromech. Microeng. 14 No 12 (December 2004) 1614-1617

(S-04-32) Building embedded microchannels using a single layered SU-8, and determining Young's modulus using a laser acoustic technique Hui Yu, Oluwaseyi Balogun, Biao Li, Todd W Murray and Xin Zhang J. Micromech. Microeng. 14 No 11 (November 2004) 1576-1584

(S-04-33) The use of high aspect ratio photoresist (SU-8) for super-hydrophobic pattern prototyping Neil J Shirtcliffe, Sanaa Aqil, Carl Evans, Glen McHale, Michael I Newton, Carole C Perry and Paul Roach J. Micromech. Microeng. 14 No 10 (October 2004) 1384-1389

(S-04-34) A rapid micro-mixer/reactor based on arrays of spatially impinging micro-jets Ren Yang, John D Williams and Wanjun Wang J. Micromech. Microeng. 14 No 10 (October 2004) 1345-1351

(S-04-35) Microstructuring characteristics of a chemically amplified photoresist synthesized for ultra-thick UV-LIGA applications Chii-Rong Yang, Gen-Wen Hsieh, Yu-Sheng Hsieh and Yu-Der Lee J. Micromech. Microeng. 14 No 8 (August 2004) 1126-1134

(S-04-36) Fabrication of an SU-8 based microfluidic reactor on a PEEK substrate sealed by a 'flexible semi-solid transfer'(FST) process Yujun Song, Challa S S R Kumar and Josef Hormes J. Micromech. Microeng. 14 No 7 (July 2004) 932-940

(S-04-37) A polymeric microgripper with integrated thermal actuators Nam-Trung Nguyen, Soon-Seng Ho and Cassandra Lee-Ngo Low J. Micromech. Microeng. 14 No 7 (July 2004) 969-974

(S-04-38) Novel three-dimensional embedded SU-8 microchannels fabricated using a low temperature full wafer adhesive bonding F J Blanco, M Agirregabiria, J Garcia, J Berganzo, M Tijero, M T Arroyo, J M Ruano, I Aramburu and Kepa Mayora J. Micromech. Microeng. 14 No 7 (July 2004) 1047-1056

(S-04-39) PMMA to SU-8 bonding for polymer based lab-on-a-chip systems with integrated optics B Bilenberg, T Nielsen, B Clausen and A Kristensen J. Micromech. Microeng. 14 No 6 (June 2004) 814-818

(S-04-40) Integrated microfluidics based on multi-layered SU-8 for mass spectrometry analysis J Carlier, S Arscott, V Thomy, J C Fourrier, F Caron, J C Camart, C Druon and P Tabourier J. Micromech. Microeng. 14 No 4 (April 2004) 619-624

(S-04-41) A tapered hollow metallic microneedle array using backside exposure of SU-8 Kabseog Kim, Daniel S Park, Hong M Lu, Wooseong Che, Kyunghwan Kim, Jeong-Bong Lee and Chong H Ahn J. Micromech. Microeng. 14 No 4 (April 2004) 597-603

(S-04-42) Oxygen quenching effect in ultra-deep x-ray lithography with SU-8 resist Bor-Yuan Shew, Tai-Yuan Huang, Kun-Pei Liu and Chang-Pin Chou J. Micromech. Microeng. 14 No 3 (March 2004) 410-414

(S-04-43) Experimental investigation of an embedded root method for stripping SU-8 photoresist in the UV-LIGA process Chien-Hung Ho and Wensyang Hsu J. Micromech. Microeng. 14 No 3 (March 2004) 356-364

(S-04-44) A mould-and-transfer technology for fabricating scanning probe microscopy probes Jun Zou, Xuefeng Wang, David Bullen, Kee Ryu, Chang Liu and Chad A Mirkin J. Micromech. Microeng. 14 No 2 (February 2004) 204-211

(S-04-45) Polymer embossing tools for rapid prototyping of plastic microfluidic devices Jagannathan Narasimhan and Ian Papautsky J. Micromech. Microeng. 14 No 1 (January 2004)96-103

(S-04-46) Wafer-Level Bonding of MEMS Structures with SU-8 Epoxy Photoresist Santeri Tuomikoski and Sami Franssila Phys. Scr. 2004 No T114 (2004) 223-226

(S-04-47) Micro check valves for integration into polymeric microfluidic devices N-T Nguyen, T-Q Truong, K-K Wong, S-S Ho and C L-N Low J. Micromech. Microeng. 14 No 1 (January 2004) 69-75

(S-03-1) BIOSENSOR BASED ON SU-8 CANTILEVER BY USING THE ELECTROSPRAY DEPOSITION OF PROTEINS J.W. Kim, Y. Yamagata, B.J. Kim, S. Takeuchi, and T. Higuchi The University of Tokyo 7th lnternational Conference on Miniaturized Chemical and Blochemlcal Analysts Systems October 5-9, 2003, Squaw Valley, CA USA

(S-03-2) Accurate Double-Height Micromolding Method for Three-Dimensional PolyDiMethylSiloxane Structures Matthieu Denoual, Laurent Griscom, Hiroshi Toshiyoshi, and Hiroyuki Fujita University of Tokyo, Japan ENS de Cachan Antenne de Bretagne, France Jap J App Phys, 1: Reg Papers, Short Notes & Rev Papers -7/03- Vol 42, 7A, pp.4598-4601

(S-03-3) Rapid fabrication of hot embossing tools using PDMS Jagannathan Narasimhan and Ian Papautsky Proc. SPIE 4982, 110 (2003)

(S-03-4) Molded multilevel modular microfluidic devices Flavio Aristone, Proyag Datta, Yohannes M. Desta, Alexey M. Espindola, and Jost Goettert Proc. SPIE 4982, 65 (2003)

(S-03-5) Microfabrication of ultra-thick SU-8 photoresist for microengines Peng Jin, Kyle C. Jiang, and Nianjun Sun Proc. SPIE 4979, 105 (2003)

(S-03-6) Thick SU-8 photolithography for BioMEMS Marc Rabarot, Jacqueline Bablet, Marine Ruty, Matthieu Kipp, Isabelle Chartier, and Christophe Dubarry Proc. SPIE 4979, 382 (2003)

(S-03-7) SU-8 based deep x-ray lithography/LIGA Linke Jian et al. Proc. SPIE 4979, 394 (2003)

(S-03-8) Characterization of SU-8 as a photoresist for electron-beam lithography Arun K. Nallani, Sang Won Park, and Jeong Bong Lee Proc. SPIE 5116, 414 (2003)

(S-03-9) Deep Dry Etching of Quartz Plate Over 100 µm in Depth Employing Ultra-Thick Photoresist (SU-8) Takayuki Fukasawa and Yasuhiro Horiike Jpn. J. Appl. Phys., Part 1 42, 3702 (2003)

(S-03-10) Challenges of processing thick and ultrathick photoresist films Mike Kubenz, Ute Ostrzinski, Freimut Reuther, and Gabi Gruetzner Proc. SPIE 5039, 1272 (2003)

(S-03-11) Electron-beam lithography for thick refractive optical elements in SU-8 Eric A. Shields, Fred Williamson, and James R. Leger J. Vac. Sci. Technol. B 21, 1453 (2003)

(S-03-12) High-resolution pattern generation using the epoxy novolak SU-8 2000 resist by electron beam lithography Mirwais Aktary, Martin O. Jensen, Kenneth L. Westra, Michael J. Brett, and Mark R. Freeman J. Vac. Sci. Technol. B 21, L5 (2003)

(S-03-13) Development of a microfabricated scanning endoscope using SU-8-based optical waveguide Wei-Chih Wang, Reynold R. Panergo, and Per G. Reinhall Proc. SPIE 5047, 305 (2003)

(S-03-14) Fabrication of optical structures using SU-8 photoresist and chemically assisted ion beam etching Lin Pang, Wataru Nakagawa, and Yeshaiahu Fainman Opt. Eng. 42, 2912 (2003)

(S-03-15) Fabrication of Atomic Force Microscope Probe with Low Spring Constant Using SU-8 Photoresist Jaekul Lee, Hyunjung Shin, Sungdong Kim, Seungbum Hong, Juhwan Chung, Hongsik Park, and Jooho Moon Jpn. J. Appl. Phys., Part 2 42, L1171 (2003)

(S-0-16) SU-8 as an electron beam lithography resist Williamson, F.; Shields, E.A.; University/Government/Industry Microelectronics Symposium, 2003. Proceedings of the 15th Biennial 30 June-2 July 2003 Page(s):57 - 60

(S-03-17) Controlling the feature size made by two-photon photopolymerization in a threshold material Ting-Wei Chang; Hong-Yao Mong; Jiunn-Yuan Lin; Jyhpyng Wang; Chau-Hwang Lee; Lasers and Electro-Optics, 2003. CLEO '03. Conference on 1-6 June 2003 Page(s):2 pp.

(S-03-18) Microneedles array for fluid extraction and drug delivery Ran Liu; Xiaohao Wang; Zhaoying Zhou; Williams, J.D.; Micromechatronics and Human Science, 2003. MHS 2003. Proceedings of 2003 International Symposium on 19-22 Oct. 2003 Page(s):239 – 244

(S-03-19) Integrated polymer waveguides for absorbance detection in chemical analysis systems Mogensen, K.B.; El-Ali, J.; Wolff, A.; Kutter, J.P.; TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003 Volume 1, 8-12 June 2003 Page(s):694 - 697 vol.1

(S-03-20) Integrated vertical screen microfilter system using inclined SU-8 structures Yong-Kyu Yoon; Jung-Hwan Park; Cros, F.; Allen, M.G.; Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on 19-23 Jan. 2003 Page(s):227 – 230

(S-03-21) A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application Sato, H.; Kakinuma, T.; Jeung Sang Go; Shoji, S.; Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on 19-23 Jan. 2003 Page(s):223 - 226

(S-03-22) Fabrication of 3D microstructures with inclined/rotated UV lithography Han, M.; Woonseob Lee; Sung-Keun Lee; Lee, S.S.; Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on 19-23 Jan. 2003 Page(s):554 - 557

(S-03-23) Mechanical strength and interfacial failure analysis of cantilevered SU-8 microposts H S Khoo, K-K Liu and F-G Tseng J. Micromech. Microeng. 13 No 6 (November 2003) 822-831

(S-03-24) Use of a photoresist sacrificial layer with SU-8 electroplating mould in MEMS fabrication I-H Song and P K Ajmera J. Micromech. Microeng. 13 No 6 (November 2003) 816-821

(S-03-25) Fabrication of micronozzles using low-temperature wafer-level bonding with SU-8 S Li, C B Freidhoff, R M Young and R Ghodssi J. Micromech. Microeng. 13 No 5 (September 2003) 732-738

(S-03-26) High resolution x-ray micromachining using SU-8 resist B-Y Shew, J-T Hung, T-Y Huang, K-P Liu and C-P Chou J. Micromech. Microeng. 13 No 5 (September 2003) 708-713

(S-03-27) Characterization of masking materials for deep glass micromachining D C S Bien, P V Rainey, S J N Mitchell and H S Gamble J. Micromech. Microeng. 13 No 4 (July 2003)S34-S40

(S-03-28) Tapered LIGA HARMs R Turner, Y Desta, K Kelly, J Zhang, E Geiger, S Cortez and D C Mancini J. Micromech. Microeng. 13 No 3 (May 2003)367-372

(S-03-29) Chemical bonding of multiwalled carbon nanotubes to SU-8 via ultrasonic irradiation Nanyan Zhang, Jining Xie, Manton Guers and Vijay K Varadan Smart Mater. Struct. 12 No 2 (April 2003) 260-263

(S-03-30) Fabrication and characterization of an SU-8 gripper actuated by a shape memory alloy thin film I Roch, Ph Bidaud, D Collard and L Buchaillot J. Micromech. Microeng. 13 No 2 (March 2003) 330-336

(S-03-31) A micro-cavity fluidic dye laser B Helbo, A Kristensen and A Menon J. Micromech. Microeng. 13 No 2 (March 2003) 307-311

(S-02-1) Pyrolysis of Negative Photoresists to Fabricate Carbon Structures for Microelectromechanical Systems and Electrochemical Applications Amit Singh, Jaishankar Jayaram, Marc Madou, and Sheikh Akbar J. Electrochem. Soc. 149, E78 (2002)

(S-02-2) Process and realization of a three-dimensional gold electroplated antenna on a flexible epoxy film for wireless micromotion system Philippe Basset, Andreas Kaiser, Dominique Collard, and Lionel Buchaillot J. Vac. Sci. Technol. B 20, 1465 (2002)

(S-02-3) Ultra-thick lithography for advanced packaging and MEMS Chad Brubaker, Rafiqul Islam, and Helge Luesebrink Proc. SPIE 4690, 270 (2002)

(S-02-4) Novel device of passive and fixed alignment of optical fiber using SU-8 photoresist Jingquan Liu, Bingchu Cai, Jun Zhu, Di Chen, Yigui Li, Jiliang Zhang, Guipu Ding, Xiaolin Zhao, and Chunsheng Yang Proc. SPIE 4928, 1 (2002)

(S-02-5) Microgripper for handling and assembly in MEMS produced by SU-8 technology Dragan Petrovic, Gordana Popovic, Tatjana Petrovic, Andreas Schneider, Ejaz Huq, Helmut Detter, and Friedrich Franek Proc. SPIE 4928, 63 (2002)

(S-02-6) SU-8 based piezoresistive mechanical sensor Thaysen, J.; Yalcinkaya, A.; Vestergaard, R.; Jensen, S.; Mortensen, M.; Vettiger, P.; Menon, A.; Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on 20-24 Jan. 2002 Page(s):320 – 323

(S-02-7) A high sensitive Fabry-Perot shear stress sensor employing flexible membrane and double SU-8 structures Fan-Gang Tseng; Chun-Jun Lin; Sensors, 2002. Proceedings of IEEE Volume 2, 12-14 June 2002 Page(s):969 - 972 vol.2

(S-02-8) Continuously-varying, three-dimensional SU-8 structures: fabrication of inclined magnetic actuators Yoonsu Choi; Kieun Kim; Allen, M.G.; Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on 20-24 Jan. 2002 Page(s):176 – 179

(S-02-9) Fabrication of high-aspect-ratio PZT thick film structure using sol-gel technique and SU-8 photoresist Futai, N.; Matsumoto, K.; Shimoyama, I.; Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on 20-24 Jan. 2002 Page(s):168 – 171

(S-02-10) Direct coupling of VCSELs to plastic optical fibers using guide holes patterned in a thick photoresist Ouchi, T.; Imada, A.; Sato, T.; Sakata, H.; Photonics Technology Letters, IEEE Volume 14, Issue 3, March 2002 Page(s):263 – 265

(S-02-11) Development of low loss organic-micromachined interconnects on silicon at microwave frequencies Newlin, D.P.; Pham, A.-V.H.; Harriss, J.E.; Components and Packaging Technologies, IEEE Transactions on [see also Components, Packaging and Manufacturing Technology, Part A: Packaging Technologies, IEEE Transactions on] Volume 25, Issue 3, Sept. 2002 Page(s):506 – 510

(S-02-12) A surface-tension driven micropump for low-voltage and low-power operations Kwang-Seok Yun; Il-Joo Cho; Jong-Uk Bu; Chang-Jin Kim; Euisik Yoon; Microelectromechanical Systems, Journal of Volume 11, Issue 5, Oct. 2002 Page(s):454 – 461

(S-02-13) Development of RF/microwave on-chip inductors using an organic micromachining process Ramachandran, R.; Pham, A.-V.H.; Advanced Packaging, IEEE Transactions on [see also Components, Packaging and Manufacturing Technology, Part B: Advanced Packaging, IEEE Transactions on] Volume 25, Issue 2, May 2002 Page(s):244 – 247

(S-02-14) Polymer-based stress sensor with integrated readout J Thaysen, A D Yalçinkaya, P Vettiger and A Menon J. Phys. D: Appl. Phys. 35 No 21 (7 November 2002) 2698-2703

(S-02-15) A low-temperature wafer bonding technique using patternable materials C-T Pan, H Yang, S-C Shen, M-C Chou and H-P Chou J. Micromech. Microeng. 12 No 5 (September 2002) 611-615

(S-02-16) A new fabrication process for ultra-thick microfluidic microstructures utilizing SU-8 photoresist C-H Lin, G-B Lee, B-W Chang and G-L Chang J. Micromech. Microeng. 12 No 5 (September 2002) 590-597

(S-02-17) Determining local residual strains of polydimethylsiloxane using ink dots, and stiffening polydimethylsiloxane using SU-8 particles C Luo, J Garra, T W Schneider, R White, J Currie and M Paranjape J. Micromech. Microeng. 12 No 5 (September 2002) 677-681

(S-02-18) Thick photoresist development for the fabrication of high aspect ratio magnetic coils M Brunet, T O'Donnell, J O'Brien, P McCloskey and S C Ó Mathuna J. Micromech. Microeng. 12 No 4 (July 2002)444-449

(S-02-19) SU-8 thick photoresist processing as a functional material for MEMS applications E H Conradie and D F Moore J. Micromech. Microeng. 12 No 4 (July 2002) 368-374

(S-02-20) Micro-channel filling flow considering surface tension effect D S Kim, K-C Lee, T H Kwon and S S Lee J. Micromech. Microeng. 12 No 3 (May 2002) 236-246

(S-02-21) New formation technology for a plasma display panel barrier-rib structure using a precise metal mold fabricated by the UV-LIGA process S-H Son, Y-S Park and S-Y Choi J. Micromech. Microeng. 12 No 1 (January 2002) 63-69

(S-01-1) Microfabrication technology for waveguide components at submillimeter wavelengths James G. Partridge and Steven R. Davies Proc. SPIE 4236, 149 (2001)

(S-01-2) Profile control of SU-8 photoresist using different radiation sources Zheng Cui, Derek W. Jenkins, Andreas Schneider, and Geoff McBride Proc. SPIE 4407, 119 (2001)

(S-01-3) Deep x-ray lithography with the SU-8 resist Laurence Singleton, Alexei L. Bogdanov, Serguei Peredkov, Oliver Wilhelmi, Andreas Schneider, Carsten Cremers, Stephan Megtert, and Andreas Schmidt Proc. SPIE 4343, 182 (2001)

(S-01-4) Spin coating properties of SU-8 thick-layer photoresist Ren-Haw Chen and Chao-Min Cheng Proc. SPIE 4345, 494 (2001)

(S-01-5) Reduction of internal stress in a SU-8-like negative tone photoresist for MEMS applications by chemical modification Ralf Ruhmann, Gisela Ahrens, Antje Schuetz, Jeanine Voskuhl, and Gabi Gruetzner Proc. SPIE 4345, 502 (2001)

(S-01-6) Orthogonal method for processing of SU-8 resist in UV-LIGA Jingquan Liu, Jun Zhu, Guipu Ding, Xiaolin Zhao, and Bingchu Cai Proc. SPIE 4557, 462 (2001)

(S-01-7) Fabrication of high-aspect-ratio microstructure on metallic substrate using SU-8 resist Jingquan Liu, Bingchu Cai, Jun Zhu, Guipu Ding, Xiaolin Zhao, Chunsheng Yang, and Di Chen Proc. SPIE 4601, 200 (2001)

(S-01-8) Micromachined optical switch with a vertical SU-8 mirror Suyan Liu, Minqiang Bu, Xiongying Ye, Zhaoying Zhou, Dacheng Zhang, Ting Li, Yilong Hao, and Zhimin Tan Proc. SPIE 4601, 354 (2001)

(S-01-9) Composite materials for planar frequency agile microwave devices Mills, J.B.; Stevens, C.J.; Edwards, D.J.; High Frequency Postgraduate Student Colloquium, 2001. 6th IEEE 9-10 Sept. 2001 Page(s):59 - 64

(S-01-10) Development of low loss organic-micromachined interconnects on silicon at microwave frequencies Newlin, D.; Pham, A.; Harriss, J.; Lee, J.B.; Radio and Wireless Conference, 2001. RAWCON 2001. IEEE 19-22 Aug. 2001 Page(s):181 - 183

(S-01-11) An integrated BioMEMS fabrication technology Gadre, A.; Kastantin, M.; Sheng Li; Ghodssi, R.; Semiconductor Device Research Symposium, 2001 International 5-7 Dec. 2001 Page(s):186 - 189

(S-01-12) Development of RF/microwave on-chip inductors using an organic micromachining process Ramachandran, R.; Newlin, D.; Pham, A.; Electrical Performance of Electronic Packaging, 2001 29-31 Oct. 2001 Page(s):97 - 100

(S-01-13) Simulation and experimental validation of electroosmotic flow in a microfluidic channel Seungbae Hong; Zhongliang Tang; Djukic, D.; Tucay, A.; Bakhru, S.; Osgood, R.; Yardley, J.; West, A.C.; Modi, V.; Microelectromechanical Systems Conference, 2001 24-26 Aug. 2001 Page(s):73 - 76

(S-01-14) Soft and rigid two-level microfluidic networks for patterning surfaces David Juncker, Heinz Schmid, André Bernard, Isabelle Caelen, Bruno Michel, Nico de Rooij and Emmanuel Delamarche J. Micromech. Microeng. 11 No 5 (September 2001) 532-541

(S-01-15) Advanced photoresist technologies for microsystems J O'Brien, P J Hughes, M Brunet, B O'Neill, J Alderman, B Lane, A O'Riordan and C O'Driscoll J. Micromech. Microeng. 11 No 4 (July 2001)353-358

(S-01-16) Micro heat flux sensor using copper electroplating in SU-8 microstructures Seok Hwan Oh, Kwang-Cheol Lee, Jaechul Chun, Moohwan Kim and Seung S Lee J. Micromech. Microeng. 11 No 3 (May 2001) 221-225

(S-01-17) Microfluidic systems with on-line UV detection fabricated in photodefinable epoxy Rebecca J Jackman, Tamara M Floyd, Reza Ghodssi, Martin A Schmidt and Klavs F Jensen J. Micromech. Microeng. 11 No 3 (May 2001) 263-269

(S-01-18) Patterning, electroplating and removal of SU-8 moulds by excimer laser micromachining Muralidhar K Ghantasala, Jason P Hayes, Erol C Harvey and Dinesh K Sood J. Micromech. Microeng. 11 No 2 (March 2001) 133-139

(S-01-19) Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS J Zhang, K L Tan, G D Hong, L J Yang and H Q Gong J. Micromech. Microeng. 11 No 1 (January 2001) 20-26

(S-01-20) A novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels Francis E H Tay, J A van Kan, F Watt and W O Choong J. Micromech. Microeng. 11 No 1 (January 2001) 27-32

(S-01-21) Low-loss polymeric optical waveguides using electron-beam direct writing (SU-8 2000) W. H. Wong, J. Zhou, and E. Y. B. Puna) Department of Electronic Engineering, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong APPLIED PHYSICS LETTERS, VOLUME 78, NUMBER 15 9 APRIL 2001

(S-01-22) Improving the Process Capability of SU-8 M. Shaw, D. Nawrocki, R. Hurditch and D. Johnson MicroChem Corp., Newton MA, 02464 Proc. SPIE 2438: pp 846-849 (1995)

(S-01-23) Improving the Process Capability of SU-8, Part II D. W. Johnson, A. Jeffries, D. W. Minsek and R. J. Hurditch MicroChem Corp., 90 Oak St., Newton, MA, 02464

(S-00-1) Improved patterning quality of SU-8 microstructures by optimizing the exposure parameters Zhong G. Ling, Kun Lian, and Linke Jian Proc. SPIE 3999, 1019 (2000)

(S-00-2) SU-8 negative photoresist for optical mask manufacturing Alexei L. Bogdanov Proc. SPIE 3999, 1215 (2000)

(S-00-3) Process characterization of an ultrathick strippable photoresist using a broadband stepper Warren W. Flack, Scott Kulas, and David W. Minsek Proc. SPIE 3999, 478 (2000)

(S-00-4) Rapid tooling using SU-8 for injection molding microfluidic components Thayne L. Edwards, Swomitra K. Mohanty, Russel K. Edwards, Charles L. Thomas, and A. Bruno Frazier Proc. SPIE 4177, 75 (2000)

(S-00-5) High-aspect-ratio microstructure fabrication using SU-8 resist Jun Zhu, Xiaolin Zhao, and Zhiping Ni Proc. SPIE 4174, 86 (2000)

(S-00-6) LIGA technology today and its industrial applications Song-Jo Chung, Herbert Hein, Juergen Mohr, Franz J. Pantenburg, Joachim Schulz, and Ulrike Wallrabe Proc. SPIE 4194, 44 (2000)

(S-00-7) Thick-layer resists for surface micromachining Bernd Loechel J. Micromech. Microeng. 10 No 2 (June 2000) 108-115

(S-99-1) Fabrication of three-dimensional microfluidic systems by stacking molded polydimethylsiloxane (PDMS) layers Byung-Ho Jo and David J. Beebe Proc. SPIE 3877, 222 (1999)

(S-99-2) Terahertz time-domain spectroscopy of films fabricated from SU-8 S. Arscott, F. Garet, P. Mounaix, L. Duvillaret, J.-L. Coutaz, and D. Lippens Electron. Lett. 35, 243 (1999)

(S-99-3) Excimer laser micromachining of structures using SU-8 Muralihar K. Ghantasala, Erol C. Harvey, and Dinesh K. Sood Proc. SPIE 3874, 85 (1999)

(S-99-4) Electric Impedence spectroscopy using microchannels with integrated metal electrodes, H. E. Ayliffe, A.B. Frazier, R.D. Rabbitt, IEEE Journal of Microelectromechanical systems, Vol. 8, No. 1, March 1999, pp. 50-57

(S-99-5) Miniaturized detectors fabricated using Si and Epon SU8, D.J. Strike et al, TRANSDUCERS'99, Sendai-Japan, (1999)

(S-99-6) 3D microfabrication by combining microstereolithography and thick resist UV lithography, A. Bertsch et al, Sensors and Actuators A, 73, (1999), pp. 14-23

(S-99-7) UV-LIGA Process for High Aspect Ratio Structures Using Stress Barriers and C-shaped Etch Holes, H.-K. Chang et alTransducers'99, Sendai-Japan, (1999)

(S-98-1) SU8 photoepoxy : A new material for FPD and PDP applications, L. Guerin, C.W. Newquist, P. Renaud, DISPLAY WORKS'98, San Jose, (1998)

(S-98-2) High aspect ratio planar coils embedded in SU8 photoepoxy for MEMS applications, L. Guerin, A. Torosdagi, P. Eichenberger, P. Renaud, EUROSENSORS XII, Southampton, (1998)

(S-98-3) Photo-polymer microchannel technologies and applications, P. Renaud, H van Lintel, M. Heuschkel, L. Guerin, µTAS'98, Banff, Alberta, 1998, pp. 17-22

(S-98-4) Microfluidic systems fabrication by lamination of photoplastic (SU8)films, L. Guerin, A. Torosdagi, M. Heuschkel, P. Renaud, NANOTECH'98, Montreux, Switzerland, (1998)

(S-98-5) Rapid prototyping of microfluidic systems in Poly(dimethylsiloxane), D.C. Duffy, J.C. McDonald, O.J.A. Schueller, G. Whitesides, Anal. Chem., Vol. 70, (1998), pp. 4974-4984

(S-98-6) The optimization of ultra-thick photoresist films, W.W. Flack, W.P. Fan, S. White, SPIE 1998 #3333-67

(S-98-7) High performance micromachined Sm2Co17 bonded magnets, B.M. Dutoit, P.A. Besse, H. Blanchard, L. Guerin, R.S. Popovic, to be published in Sensors and Actuators A77 1998

(S-98-8) Improvements and recent advances in nanocomposite capacitors using a colloidal technique, V. Agarwal, P. Chahal, R. Tummala, M.G. Allen, 1998 Electronic Components and Technology Canference, Denver, (1998), pp. 165-170

(S-98-9) The micromachined accelerometer fabrication using thick resist,T. Kawabata, K. Maenaka, Technical digest of the 16th Sensor Symposium, Japan, (1998), pp. 199-202

(S-98-10) Taguchi Optimization for processing EPON SU8 resist, B. Eyre et al., Proceedings MEMS'98, Heidelberg, (1998), pp. 218-222

(S-98-11) Buried microchannels in polymer for delivering of solutions to neurons in a network, M. Heuschkel et al., Sensors and Actuators : B, 48/1-3, (1998), pp. 356-361

(S-97-1) Negative photoresists for optical lithography, J. M. Shaw, J. D. Gelorme, N. C. LaBianca, W. E. Conley, and S. J. Holmes, IBM Journal of Research and Development, 41(1997), pp. 81-94

(S-97-2) High aspect ratio ultrathick, negative-tone near-UV photoresist for MEMS applications, M. Despont, H. Lorenz, N.Fahrni, J. Brugger. P. Renaud, and P. Vettiger, MEMS'97, IEEE, Nagoya, (1997), pp. 518-522

(S-97-3) Mechanical charaterization of a new high-aspect-ratio near UV-Photoresist, H. Lorenz, M. Laudon, P. Renaud MNE'97, Athens, Greece, (1997)

(S-97-4) Simple and low cost fabrication of embedded microchannels by using a new thick-film photoplastic, L. Guerin, M. Bossel, M. Demierre, S. Calmes, and P. Renaud, Transducers 1997, Chicago, (1997), pp. 1419-1422

(S-97-5) Fabrication process of high-aspect ratio elastic structures for piezoelectric motor applications, L. Dellmann et al., Transducers'97, Chicago, (1997)

(S-97-6) Terahertz time-domain spectroscopy of films fabricated from SU-8, S. Arscott, F. Garet, P. Mounaix, L. Duvillaret, J.-L. Coutaz, D. Lippens, Electronics Letters, Vol. 35, No. 3, pp. 243-244

(S-96-1) 7. SU8 : A low-cost negative resist for MEMS, H. Lorenz, M. Despont, N. Fahrni, N. LaBianca, P. Renaud, P. Vettiger, EPON MicroMechanics Europ MME 96, Spain, (1996), pp. 32-35

(S-96-2) High frequency transmission line using micromachined polymer dielectric, J.R. Thorpe, D.P. Steenson, R.E. Mies, Electronics Letters, Vol. 34, No. 12, pp. 1237-1238

(S-95-1) High aspect ratio resist for thick film applications, N. LaBianca, and J. Delorme, in Proc. SPIE vol. 2438, SPIE, (1995), pp. 846-852

(S-95-2) High aspect ratio optical resist chemistry for MEMS applications, N. LaBianca, J. Gelorme, K. Lee, E. Sullivan, and J. Shaw, 4th Int. Symp. on Magnetic Materials, Processes, and Devices, The Electrochem. Soc., 95-18 (1995), pp.386-396

(S-95-3) Micromachining applications for a high resolution ultra-thick photoresist, K. Lee, N. LaBianca, S. Rishton, and S. Zohlgharnain, J. Vac. Scien. Technol. B, 13(1995), pp. 3012-3016

(S-90-1) Encapsulation of Chemically Sensitive Field-effect Transistors with Photocurable Epoxy Resin, C. Dumschat et al, Sensors and Actuators B, 2, (1990), pp. 271-276