OVERVIEW
MEMS
• Microfluidics
• Cantilevers
• C-MEMS, C-NEMS
• LIGA
• Surface Modification
• Sacrificial Via Protection
• Microwell Arrays
DISPLAYS
• Structures – Pixel Walls
• Dielectric Layers
III-Vs, OPTOELECTRONICS
• T-Gates
• Airbridges
• Wafer Thinning
• Passivation
• Microlenses
• Waveguides
ADVANCED PACKAGING
• HAR Micro-plated Structures
