Products
SU-8 3000
SU-8 3000 has been formulated for improved adhesion and reduced coating stress. It is being used where high bond strength and improved flexibility for microstructure fabrication is desired. As a result, adhesion to the substrate is greatly improved.
Material uses:
- Waveguides
- Microfluidics
- Stamps
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Material attributes:
- Improved adhesion
- Reduced coating stress
- Vertical sidewalls
- Greater than 100 μm film thickness in a single coat
- Excellent dry etch resistance
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10µm features in 50µm SU-8 3000 (contact expose)
Source: MicroChem
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