Products

Micro Resist Technology

In addition to handling our own products, MicroChem is the exclusive North American distributor of Micro Resist Technology’s (MRT) line of specialty photoresists. Below is a brief description for each product line; product overviews and process guides are accessible from the chart. For more information about any of these products, please contact our technical sales group (617-965-5511 or sales@microchem.com) or visit the MRT website at www.microresist.de

Thick film positive resists, negative resists for single layer lift off

• ma-P 1200 

Thick Film Positive Resists

• ma-P 1275 and ma-P 1275 HV
   Ideally suited for high pH plating applications 

Film thickness up to 60µm
i-line sensitive
High thermal and plasma etch stability
Etch and plating stability to pH 12

• ma-N 400 -- Ideally suited for evaporative lift-off processing 

Film thickness up to 20µm
Sidewalls are tunable for lift-off processing
Aqueous developable
Plating stability to pH13

• ma-N 1400 Ideally suited for high temperature
   lift-off processing 

Film thickness from 0.5µm- 7.0µm
i-line sensitive
Thermally stable to 170° C
Compatible with high temperature sputter lift-off processes
Resist sidewalls are easily tunable for lift-off processing

• ma-N 2400 deep UV resists & e-beam 

50nm resolution with e-beam
High plasma etch stability

Nano Imprint Lithography Resists

• Thermoplastic and thermoset materials for NIL,
   UV curable materials, permanent resist 

Film thickness from 200-400nm
Resolution: 50nm lines & spaces (300nm film thickness)

mr-I 7000E/8000E thermoplastic polymer
mr-I 7000R/8000R thermoplastic polymers
     with mold release properties
mr-I 9000E thermoset polymers
mr-I 9000M thermal cure material for
     permanent applications
mr-NIL 6000E UV curable material for
     permanent applications with isothermal processing
mr-UVCur06 UV curable imprint material
mr-UVCur21 curable imprint material
mr-I T85 Lab on chip applications
mr-APSI Adhesion Promoter for UV-nanoimprint polymers
mr-I PMMA polymer for nanoimprint lithography

Hybrid Polymers

• Advanced materials for optics and lithograph 

Ormocore - Core material for planar optical waveguides
Ormoclad - Cladding material for planar optical waveguides
Ormocomp - Material for micro optical components
Ormoclear - Clear material for micro optical components
Ormostamp - Material for producing NIL stamps
Ormodev - Developer for hybrid polymers
Ormoprime08 - Primer for hybrid polymers

Negative Tone Resists for Waveguides 

Epocore – Negative photoresist for microsystems technology
and waveguide core material
Epoclad – Negative photoresist for microsystems technology
     and waveguide cladding